@article{ART001112654},
author={Seung-min Kang},
title={ZnO film growth on sapphire substrate by RF magnetron sputtering},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2004},
volume={14},
number={5},
pages={215-219}
TY - JOUR
AU - Seung-min Kang
TI - ZnO film growth on sapphire substrate by RF magnetron sputtering
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2004
VL - 14
IS - 5
PB - The Korea Association Of Crystal Growth, Inc.
SP - 215
EP - 219
SN - 1225-1429
AB - ZnO epitaxial films have been grown on a (0001)sapphire substrate by RF magnetron sputtering. The single crystalline ZnO films were grown at the condition of growth rate of about 0.1~0.2 mm/hr and the substrate temperature of 600oC. The film thickness was about 400~500 nm. The thin film quality and micro-structure have been evaluated by XRD and TEM observation.
KW - ZnO;Epitaxial films;RF magnetron sputtering;Single crystalline phase
DO -
UR -
ER -
Seung-min Kang. (2004). ZnO film growth on sapphire substrate by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 14(5), 215-219.
Seung-min Kang. 2004, "ZnO film growth on sapphire substrate by RF magnetron sputtering", Journal of the Korean Crystal Growth and Crystal Technology, vol.14, no.5 pp.215-219.
Seung-min Kang "ZnO film growth on sapphire substrate by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 14.5 pp.215-219 (2004) : 215.
Seung-min Kang. ZnO film growth on sapphire substrate by RF magnetron sputtering. 2004; 14(5), 215-219.
Seung-min Kang. "ZnO film growth on sapphire substrate by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 14, no.5 (2004) : 215-219.
Seung-min Kang. ZnO film growth on sapphire substrate by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 14(5), 215-219.
Seung-min Kang. ZnO film growth on sapphire substrate by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology. 2004; 14(5) 215-219.
Seung-min Kang. ZnO film growth on sapphire substrate by RF magnetron sputtering. 2004; 14(5), 215-219.
Seung-min Kang. "ZnO film growth on sapphire substrate by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 14, no.5 (2004) : 215-219.
