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@article{ART001258021},
author={이승엽 and Park,Byung-Ok},
title={Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2008},
volume={18},
number={2},
pages={72-75}

TY - JOUR
AU - 이승엽
AU - Park,Byung-Ok
TI - Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2008
VL - 18
IS - 2
PB - The Korea Association Of Crystal Growth, Inc.
SP - 72
EP - 75
SN - 1225-1429
AB - Zinc oxide (ZnO) thin films were prepared by a sol-gel method. The structural and electrical properties were investigated by varying drying and annealing temperatures. The thin films were coated (250 nm) by spin-coating method on glass substrates. The optimum drying temperature of ZnO thin films was 300℃ where the resistivity was the lowest and the preferred c-axis orientation was the highest. The annealing was carried out in air and inert atmospheric conditions. The degree of the preferred c-axis orientation was estimated. The highest preferred c-axis orientation was recorded at 600℃. The preferred c-axis orientation and grain growth resulted in the mobility enhancement of the ZnO thin films, and the lowest resistivity was 0.62 Ω·cm at 600℃.
KW - Thin film;C-axis orientation;Zinc oxide;Sol-gel;Heat-treatment
DO -
UR -
ER -

이승엽 and Park,Byung-Ok. (2008). Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method. Journal of the Korean Crystal Growth and Crystal Technology, 18(2), 72-75.

이승엽 and Park,Byung-Ok. 2008, "Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method", Journal of the Korean Crystal Growth and Crystal Technology, vol.18, no.2 pp.72-75.

이승엽, Park,Byung-Ok "Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method" Journal of the Korean Crystal Growth and Crystal Technology 18.2 pp.72-75 (2008) : 72.

이승엽, Park,Byung-Ok. Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method. 2008; 18(2), 72-75.

이승엽 and Park,Byung-Ok. "Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method" Journal of the Korean Crystal Growth and Crystal Technology 18, no.2 (2008) : 72-75.

이승엽; Park,Byung-Ok. Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method. Journal of the Korean Crystal Growth and Crystal Technology, 18(2), 72-75.

이승엽; Park,Byung-Ok. Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method. Journal of the Korean Crystal Growth and Crystal Technology. 2008; 18(2) 72-75.

이승엽, Park,Byung-Ok. Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method. 2008; 18(2), 72-75.

이승엽 and Park,Byung-Ok. "Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method" Journal of the Korean Crystal Growth and Crystal Technology 18, no.2 (2008) : 72-75.