@article{ART001258022},
author={Sungwook Lee and BYUNGYOU HONG and Yong Seob Park},
title={Characterization of transparent ATO conducting films prepared by RF magnetron sputtering},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2008},
volume={18},
number={2},
pages={76-80}
TY - JOUR
AU - Sungwook Lee
AU - BYUNGYOU HONG
AU - Yong Seob Park
TI - Characterization of transparent ATO conducting films prepared by RF magnetron sputtering
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2008
VL - 18
IS - 2
PB - The Korea Association Of Crystal Growth, Inc.
SP - 76
EP - 80
SN - 1225-1429
AB - In this study, we synthesized ATO films using RF magnetron sputtering method consisted of SnO₂target added Sb of 6 wt% and investigated the effect of O₂on structural, electrical, and optical properties of ATO films. As a result, in case of O₂/Ar ratio of 0.11, we obtained ATO films exhibit the properties such as the resistivity about 8 × 10-³ [Ω-cm], the
transmittance of 85.17 %, and retile structure.
KW - ATO;Sputtering;Crystallization;Resistivity;Transmittance;Optical band gap;Surface roughness
DO -
UR -
ER -
Sungwook Lee, BYUNGYOU HONG and Yong Seob Park. (2008). Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 18(2), 76-80.
Sungwook Lee, BYUNGYOU HONG and Yong Seob Park. 2008, "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering", Journal of the Korean Crystal Growth and Crystal Technology, vol.18, no.2 pp.76-80.
Sungwook Lee, BYUNGYOU HONG, Yong Seob Park "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 18.2 pp.76-80 (2008) : 76.
Sungwook Lee, BYUNGYOU HONG, Yong Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. 2008; 18(2), 76-80.
Sungwook Lee, BYUNGYOU HONG and Yong Seob Park. "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 18, no.2 (2008) : 76-80.
Sungwook Lee; BYUNGYOU HONG; Yong Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 18(2), 76-80.
Sungwook Lee; BYUNGYOU HONG; Yong Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology. 2008; 18(2) 76-80.
Sungwook Lee, BYUNGYOU HONG, Yong Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. 2008; 18(2), 76-80.
Sungwook Lee, BYUNGYOU HONG and Yong Seob Park. "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 18, no.2 (2008) : 76-80.
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