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@article{ART001258022},
author={Sungwook Lee and HONG, BYUNGYOU and Yong-Seob Park},
title={Characterization of transparent ATO conducting films prepared by RF magnetron sputtering},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2008},
volume={18},
number={2},
pages={76-80}

TY - JOUR
AU - Sungwook Lee
AU - HONG, BYUNGYOU
AU - Yong-Seob Park
TI - Characterization of transparent ATO conducting films prepared by RF magnetron sputtering
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2008
VL - 18
IS - 2
PB - The Korea Association Of Crystal Growth, Inc.
SP - 76
EP - 80
SN - 1225-1429
AB - In this study, we synthesized ATO films using RF magnetron sputtering method consisted of SnO₂target added Sb of 6 wt% and investigated the effect of O₂on structural, electrical, and optical properties of ATO films. As a result, in case of O₂/Ar ratio of 0.11, we obtained ATO films exhibit the properties such as the resistivity about 8 × 10-³ [Ω-cm], the transmittance of 85.17 %, and retile structure.
KW - ATO;Sputtering;Crystallization;Resistivity;Transmittance;Optical band gap;Surface roughness
DO -
UR -
ER -

Sungwook Lee, HONG, BYUNGYOU and Yong-Seob Park. (2008). Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 18(2), 76-80.

Sungwook Lee, HONG, BYUNGYOU and Yong-Seob Park. 2008, "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering", Journal of the Korean Crystal Growth and Crystal Technology, vol.18, no.2 pp.76-80.

Sungwook Lee, HONG, BYUNGYOU, Yong-Seob Park "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 18.2 pp.76-80 (2008) : 76.

Sungwook Lee, HONG, BYUNGYOU, Yong-Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. 2008; 18(2), 76-80.

Sungwook Lee, HONG, BYUNGYOU and Yong-Seob Park. "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 18, no.2 (2008) : 76-80.

Sungwook Lee; HONG, BYUNGYOU; Yong-Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 18(2), 76-80.

Sungwook Lee; HONG, BYUNGYOU; Yong-Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. Journal of the Korean Crystal Growth and Crystal Technology. 2008; 18(2) 76-80.

Sungwook Lee, HONG, BYUNGYOU, Yong-Seob Park. Characterization of transparent ATO conducting films prepared by RF magnetron sputtering. 2008; 18(2), 76-80.

Sungwook Lee, HONG, BYUNGYOU and Yong-Seob Park. "Characterization of transparent ATO conducting films prepared by RF magnetron sputtering" Journal of the Korean Crystal Growth and Crystal Technology 18, no.2 (2008) : 76-80.