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Synthesis of PZT thin films made by PZ/PT multi-layered structure

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2008, 18(3), pp.105~108
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

Kim Sung Dae 1,  Se-Hwan Bae 2,  Jeon, Kie-Beom 2,  ByungMoon Jin 3

1동명대학교
2동아대학교
3동의대학교

Accredited

ABSTRACT

Four different thin films were made by depositing PZ and PT in different stacking sequences. PZ and PT phases are preferably co-existed in sample A and C that are annealing after each coatings. The sample B and D, on the other hands, have tendency toward the PZT phase after co-firing the sample. The sample B that started from PT stacking first was more stable PZT phase than that of PZ first sample D.

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