Effect of the processing variables on the formation of Pb(Sc1/2Nb1/2)O3 thin layers (Pb(Sc1/2Nb1/2)O3 박막 형성에 미치는 공정변수의 영향)

Kyung Bong Park (박경봉); 권승협; Tae Heui Kim (김태희)

Effect of the processing variables on the formation of Pb(Sc1/2Nb1/2)O3 thin layers

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2009, 19(2), pp.70~74
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering

Kyung Bong Park ¹, 권승협 ¹, Tae Heui Kim ¹

¹안동대학교

Accredited

ABSTRACT

Effect of the processing variables on the formation of Pb(Sc1/2Nb1/2)O3 (hereafter PSN) thin layers prepared on Pt(111)/Ti/SiO2/Si substrates using the sol-gel and the spin coating method has been studied. After each deposition, the coated films were heated at 370oC for 5 min. Then they were finally sintered at temperature range of 600~700oC by RTA(rapid thermal annealing). The final multilayered films showed a (111) preferred orientation. On a while, the layer-bylayer crystallization of multilayered amorphous thin films without the intermediate heating exhibited a (100) preferred orientation. In case of heat treatment in the tube furnace with the heating rate of 4oC/min, (100) and (111) oriented thin layers were formed simultaneously. The microstructure of the deposited films were dense and crack-free with thickness of 300nm, irrespective of the processing variables.

KEYWORDS

Ferroelectrics, thin films, Pb(Sc1/2Nb1/2)O3, Orientation, Perovskite

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