Crystal growth from melt in combined heater-magnet modules

P. Rudolph; M.Czupalla; N. Dropka; Ch. Frank-Rotsch; F.-M. Kieβling; B. Lux; W. Miller; U. Rehse; O. Root; O. Klein

Crystal growth from melt in combined heater-magnet modules

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2009, 19(5), pp.215-222
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering

P. Rudolph ¹, M.Czupalla ², N. Dropka ³, Ch. Frank-Rotsch ¹, F.-M. Kieβling ¹, B. Lux ¹, W. Miller ¹, U. Rehse ¹, O. Root ¹, O. Klein ⁴

¹Leibniz Institute for Crystal Growth
²Leibniz Institute for Crystal Growth (IKZ)
³Leibniz Institute for Crystal Growth
⁴Weierstrass-Institute for Applied Analysis and Stochastics

Accredited

ABSTRACT

Many concepts of external magnetic field applications in crystal growth processes have been developed to control melt convection, impurity content and growing interface shape. Especially, travelling magnetic fields (TMF) are of certain advantages. However, strong shielding effects appear when the TMF coils are placed outside the growth vessel. To achieve a solution of industrial relevance within the framework of the KRISTMAG ® project inner heater-magnet modules (HMM) for simultaneous generation of temperature and magnetic field have been developed. At the same time, as the temperature is controlled as usual, e.g. by DC, the characteristics of the magnetic field can be adjusted via frequency, phase shift of the alternating current (AC) and by changing the amplitude via the AC/DC ratio. Global modelling and dummy measurements were used to optimize and validate the HMM configuration and process parameters. GaAs and Ge single crystals with improved parameters were grown in HMM-equipped industrial liquid encapsulated Czochralski (LEC) puller and commercial vertical gradient freeze (VGF) furnace, respectively. The vapour pressure controlled Czochralski (VCz) variant without boric oxide encapsulation was used to study the movement of floating particles by the TMF-driven vortices.

KEYWORDS

Melt crystal growth, Travelling magnetic field, Combined heater-magnet module

Citation status

* References for papers published after 2023 are currently being built.

[book] D.T.J. Hurle / 1994 / The use of a magnetic field in melt growth. in: Handbook of Crystal Growth, Vol. 2a / Elsevier : 259~

[journal] P. Dold / 1999 / Rotating magnetic fields: fluid flow and crystal growth applications / Prog. Cryst. Growth Charact. Mater 38 : 7~

[book] K. Kakimoto / 2004 / Modeling of fluid dynamics in the Czochralski growth of semiconductor crystals. in: Crystal Growth - from Fundamentals to Technology / Elsevier : 169~

[journal] B.-C. Sim / 2005 / Oxygen concentration in the Czochralski-grown crystal with cusp-magnetic field / J. Crystal Growth 275 : 455~

[journal] A. Moreno / 2007 / Protein crystal growth in gels and stationary magnetic fields / Cryst. Res. Technol. 42 : 231~

[journal] S. Yesilyurt / 2004 / The effect of the traveling magnetic field (TMF) on the buoyancy-induced convection in the vertical Bridgman growth of semiconductors / J. Crystal Growth 263 : 80~

[journal] Ch. Frank-Rotsch / 2008 / Numerical optimization of the interface shape at the VGF growth of semiconductor crystals in a traveling magnetic field / J. Crystal Growth 310 : 1505~

[journal] R. Lantzsch / 2008 / Vertical gradient freeze growth with external magnetic fields / J. Crystal Growth 310 : 1518~

[journal] Th. Wetzel / 2001 / Die Schmelzströmung im Si-Czochralski- Prozeβ unter dem Einfluβ elektromagnetischer Felder / Fortschritt-Berichte VDI, Reihe 9, Nr. 328 : 1~

[journal] E. Tomzig / 2003 / Application of dynamic and combined magnetic fields in the 300 mm silicon single-crystal growth / Mat. Sci. in Semicond. Processing 5 : 347~

[journal] A. Krauze / 2004 / Numerical D modelling of turbulent melt flow in CZ system with dynamic magnetic fields / J. Crystal Growth 266 : 40~

[journal] O. Klein / 2008 / Numerical simulation of Czochralski crystal growth under the nfluence of a traveling magnetic field generated by internal heater-magnet module (HMM) / J. Crystal Growth 310 : 1523~

[journal] P. Rudolph / 2008 / Travelling magnetic fields applied to bulk crystal growth from the melt: the step from basic research to industrial scale / J. Crystal Growth 310 : 1298~

[confproc] P. Rudolph / 2008 / Crystal growth in heater-magnet modules - from concept to use / Proc. Int. Scientific Colloquium Modelling for Electromagnetic Processing (MEP 08) : 79~

[other] P. Rudolph / Patent DE 10 2007 020 239, WO 2007/122231

[other] Ch. Frank-Rotsch / Patent DE 10 2007 028 548, WO 2008/1551 37

[other] P. Lange / Patent DE 10 2007 028 547, WO 2008/155138

[journal] P. Schwesig / 2004 / Comparative numerical study of the effects of rotating and travelling magnetic fields on the interface shape and thermal stress in the VGF growth of InP crystals / J. Crystal Growth 266 : 224~

[journal] Ch. Frank-Rotsch / 2009 / Vertical gradient freeze of 4 inch Ge crystals in a heater-magnet module / J. Crystal Growth 311 : 2294~

[other] Ch. Frank-Rotsch / Patent DE 10 2007 028 548, WO 2008/155137

[journal] H. Kasjanow / 2008 / 3D numerical modeling of asymmetry effects of a heater-magnet module for VGF and LEC growth under traveling magnetic fields / J. Crystal Growth 310 : 1540~

[confproc] O. Klein / 2008 / Numerical simulations of the influence of a traveling magnetic field, generated by an internal heater magnet module, on Czochralski crystal growth / Proc. Intern. Sci. Colloquium “Modelling for Electromagnetic Processing” (MEP 08) : 91~

[journal] P. Rudolph / 2006 / Growth and characterization of GaAs crystals produced by the VCz method without boric oxide encapsulation / J. Crystal Growth 292 : 532~

[journal] M. Jurisch / 2005 / LEC- and VGF-growth of SI GaAs single crystals - recent developments and current issues / J. Crystal Growth 275 : 283~

[journal] N.V. Abrosimov / 2002 / Lateral photovoltage scanning (LPS) method for the visualization of the solid-liquid interface of Si1 − xGex single crystals / J. Crystal Growth 273 : 356~

[journal] N. Dropka / 2009 / Numerical study on transport phenomena in a directional solidification rocess in the presence of travelling magnetic fields

KJCKorea
Journal Central

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19