Crystal structure investigation of AlN crystal grown on 6H-SiC seed by a physical vapor transport method (6H-SiC 종자 결정을 사용하여 PVT법으로 성장된 AlN 결정 연구)

Hee-Won Shin (신희원); Dong-Hun Lee (이동훈); Hwang-Ju Kim (김황주); Mi-Seon Park (박미선); Yeon-Suk Jang (장연숙); Won Jae Lee (이원재); Jung- Gon Kim (김정곤); Seongmin Jeong (정성민); Myung-Hyun Lee (이명현); Won-Seon Seo (서원선)

doi:10.6111/JKCGCT.2016.26.1.049

Crystal structure investigation of AlN crystal grown on 6H-SiC seed by a physical vapor transport method

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2016, 26(1), pp.49~52
DOI : 10.6111/JKCGCT.2016.26.1.049
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : December 7, 2015
Accepted : January 4, 2016
Published : February 29, 2016

Hee-Won Shin ¹, Dong-Hun Lee ¹, Hwang-Ju Kim ¹, Mi-Seon Park ¹, Yeon-Suk Jang ¹, Won Jae Lee ¹, Jung- Gon Kim ², Seongmin Jeong ³, Myung-Hyun Lee ³, Won-Seon Seo ³

¹동의대학교
²대구경북과학기술원
³한국세라믹기술원

Accredited

ABSTRACT

The effect of process parameters such as the growth pressure and temperature on the AlN crystal growth has been investigated. AlN crystal was grown onto 6H-SiC seed crystal using PVT (Physical Vapor Transport) method. Crystal properties and morphology of AlN crystal was changed with growth pressure and temperature. Raman analysis confirmed that AlN crystals with different orientation were successfully grown on SiC seed crystal.

KEYWORDS

Aluminum nitride, AlN, PVT (Physical Vapor Transport), Growth pressure, Growth temperature

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Crystal structure investigation of AlN crystal grown on 6H-SiC seed by a physical vapor transport method

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* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Crystal structure investigation of AlN crystal grown on 6H-SiC seed by a physical vapor transport method

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