Effects of heat-treatment on the properties of ITO films on transparent polyimide substrates by RF magnetron sputtering (RF 마그네트론 스퍼터링법으로 투명 PI 기판에 증착된 ITO 박막의 특성에 미치 는 열처리의 영향)

Hae-Chan Kim (김해찬); Cho, Hyun (조현); Jin-Kon Kim (김진곤)

doi:10.6111/JKCGCT.2020.30.1.012

Effects of heat-treatment on the properties of ITO films on transparent polyimide substrates by RF magnetron sputtering

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(1), pp.12-16
DOI : 10.6111/JKCGCT.2020.30.1.012
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : January 6, 2020
Accepted : January 30, 2020
Published : February 29, 2020

Hae-Chan Kim ¹, Cho, Hyun ², Jin-Kon Kim ²

¹주식회사 비오엔
²부산대학교

Accredited

ABSTRACT

Indium tin oxide (ITO) films were prepared onto transparent polyimide (PI) substrates by RF magnetron sputtering at room temperature. The deposited ITO films were heat-treated at various temperatures (50, 100, 150, and 200°C). The effect of post heat-treatment temperature on structural, electrical and optical properties of ITO films were investigated. It was found that the as-deposited ITO films were amorphous and the degree of crystallinity and the grain size increased with an increasing heat-treatment temperature, which led to the increase in carrier concentration and mobility. The electrical resistivity of as-deposited ITO films was 2.73×10-3Ω·cm. With the heat-treatment temperature increasing from 50 to 200°C, the electrical resistivity decreased from 2.93×10-3 to 1.21×10-4Ω·cm. The average transmittance (400~800 nm) of the ITO deposited PI substrates was decreasing with post heat-treatment temperature and was above 81 % for the temperatures 50~ 150°C and decreased considerably to 78 % at 200°C.

KEYWORDS

Indium tin oxide (ITO), Transparent PI substrate, Heat-treatment, Resistivity, Optical transmittance

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Effects of heat-treatment on the properties of ITO films on transparent polyimide substrates by RF magnetron sputtering

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Effects of heat-treatment on the properties of ITO films on transparent polyimide substrates by RF magnetron sputtering

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