Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching (CaO-Al2O3-SiO2 계 벌크 유리와 스프레이 코팅막의 CF4/O2/Ar 플라즈마 식각 시 내식성 비교)

Hyein Na (나혜인); Jewon Park (박제원); Jae-hyuk Park (박재혁); Dae-gun Kim (김대근); Sungchurl Choi (최성철); Kim Hyeong Jun (김형준)

doi:10.6111/JKCGCT.2020.30.2.066

Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(2), pp.66-72
DOI : 10.6111/JKCGCT.2020.30.2.066
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : March 6, 2020
Accepted : March 28, 2020
Published : April 30, 2020

Hyein Na ¹, Jewon Park ¹, Jae-hyuk Park ², Dae-gun Kim ², Sungchurl Choi ³, Kim Hyeong Jun ¹

¹한국세라믹기술원
²아이원스
³한양대학교

Accredited

ABSTRACT

The difference of plasma resistance between the CAS glass bulk and coating films were compared. Plasmaresistance was confirmed by analyzing the etch rate and the microstructure of the surface when the CAS glass bulk andthe glass coating film were etched with CF4/O2/Ar plasma gas. CAS glass coating film was etched up to 25 times fasterthan the glass bulk. A statistically high correlation between the surface roughness and the etching rate of the coating filmwas derived, and thus, the high surface roughness of the coating film was determined to cause rapid etching. In addition,cristobalite crystals that has a low Ca content and a high Si content, was foamed on the glass coating film. Therefore, theCAS glass coating film is considered to have low plasma resistance compared to the glass bulk.

KEYWORDS

Corrosion, Sintering, CaO-Al2O3-SiO2 (CAS) glass, Surface roughness

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[journal] T. Nam / 2019 / Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor / Appl. Surf. Sci 485 : 381~

[journal] R. Pierron / 2017 / Etching of semiconductors and metals by the Photonic Jet with shaped optical fiber tips / Appl. Surf. Sci 418 : 452~

[journal] K. C. Yang / 2019 / Effects of superimposed dual-frequency(13. 56/2 MHz)inductively coupled plasma source on the uniformity of Ar/CF4 plasma / Vacuum 168 : 108802~

[journal] Sang-Jun Park / 2016 / The Effects of Water Addition on the Color and Crystalline Phase of Y2O3 Coatings Fabricated by Plasma Suspension Spray / 한국세라믹학회지 / 한국세라믹학회 53(6) : 641~646

[journal] J. K. Lee / 2017 / Fragmentation behavior of Y2O3 suspension in axially fed suspension plasma spray / Surf. Coat. Technol 309 : 456~

[journal] J. H. Choi / 2019 / Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar + / J. Non-Cryst. Solids 521 : 119498~

[journal] J. H. Choi / 2019 / Plasma corrosion resistance of RO-Al2O3-SiO2(R : Alkaline Earth)under fluorocarbon plasma with Ar + : Ⅱ. Plasma resistant glass / Corros. Sci 146 : 247~

[journal] H. Na / 2019 / The Effect of composition of Plasma Resistance of CaO-Al2O3-SiO2glasses under Fluorocarbon Plasma with Ar + / Appl. Surf. Sci 476 : 663~

[journal] 나혜인 / 2019 / A study of sintering behavior of spray coating in CaO-Al2O3-SiO2 glasses on Al2O3 substrate / 한국결정성장학회지 / 한국결정성장학회 29(6) : 298~307

[book] S. Satsuka / 1975 / Glass handbook / Asakura Shoten : 888~

[other] Y. Masayuki / 1991 / For the first time to make glass / Ceramics Basic Lecture/Tokyo Institute of Technology School of Engineering, Department of Inorganic Materials Engineering, ed. 4

[journal] G. H. Hwang / 2002 / Physical properties of barrier ribs of plasma display panels : 1, Formation of pores during sintering of lead borosilicate glass frits / J. Am. Ceram. Soc 85 : 2956~

[thesis] 전국현 / 2012 / 표면개질 인공경량골재의 발포거동에 대한 연구 / 석사 / 경기대학교 대학원

[journal] A. Karamanov / 2006 / Sinter-crystallisation in the diopside-albite system Part I. Formation of induced crystallisation porosity / J. Eu. Ceram. Soc 26 : 2511~

[journal] E. D. Zanotto / 1988 / Experimental test of the general theory of transformation kinetics : Homogeneous nucleation in a Na2O-2CaO-3SiO2 glass / J. Non-Cryst. Solids 104 : 73~

[journal] M. O. Prado / 2002 / Glass sintering with concurrent crystallization / C. R. Chimie 5 : 773~

[journal] E. M. Rabinovich / 1985 / Preparation of glass by sintering / J. Mate. Sci 20 : 4259~

[journal] J. B. Parise / 1994 / Pressure-induced phase transition and pressure dependence of crystal structure in low()and Ca/Al-doped cristobalite / J. Appl. Phys 75 : 1361~

[journal] S.H. Abd E Rahim / 2017 / Wollastonite-pseudoollastonite from silica fume, limestone and glass cullet composite / Inter Ceram : 232~

[journal] F. Pei / 2018 / Influence of low magnesia content on the CaOAl 2O3-SiO2 glass-ceramics : Its crystallization behavior, microstructure and physical properties / Ceram. Inter 44 : 20132~

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching

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* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching

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KEYWORDS

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