본문 바로가기
  • Home

Effect of O2/Ar+O2 concentration on phase stability of transparent Mn doped SnO2 monolayer film

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2021, 31(4), pp.154~158
  • DOI : 10.6111/JKCGCT.2021.31.4.154
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering
  • Received : July 26, 2021
  • Accepted : August 6, 2021
  • Published : August 31, 2021

Taekeun Kim 1,  Jang, Gun-eik 2

1충북대학교 신소재공학과
2충북대학교

Accredited

ABSTRACT

The optical transmittance of Mn-doped SnO2 monolayer film increased gradually from 80.9 to 85.4 % at 550 nm wavelengths upon increasing the O2/Ar+O2 concentration rate from 0 to 7.9 % and the band gap energy changed from 3.0 to 3.6 eV. The resistivity tended to decrease from 3.21 Ω·cm to 0.03 Ω·cm, reaching a minimum at 2.7 %, and then gradually increased from 0.03 to 52.0 Ω·cm at higher O2/Ar+O2 gas concentration ratio. Based on XPS spectra analysis, the Sn 3d5/2 peak of Mn-doped SnO2 single layer shifted slightly from 486.40 to 486.58 and O1s peak a lso shifted f rom 530.20 to 530.33 eV with increase the O2/Ar+O2 concentration ratio. Therefore, the XPS spectra results indicate that a multiphase with SnO and SnO2 coexisted in the sputtered Mn-doped SnO2 monolayer film.

Journal Copyright Policy

BY-NC 아이콘

This license enables reusers to distribute, remix, adapt, and build upon the material in any medium or format for noncommercial purposes only, and only so long as attribution is given to the creator.

Citation status

* References for papers published after 2025 are currently being built.