A study on the brownish ring of quartz glass crucible for silicon single crystal ingot (실리콘 단결정 잉곳용 석영유리 도가니의 brownish ring에 대한 연구)

Yoon Sung Jung (정윤성); Jae Ho Choi (최재호); Kyung Won Min (민경원); Young Min Byeon (변영민); Won Bin Im (임원빈); Sung-Hun Noh (노성훈); Nam-Hun Kang (강남훈); Kim Hyeong Jun (김형준)

doi:10.6111/JKCGCT.2022.32.3.115

A study on the brownish ring of quartz glass crucible for silicon single crystal ingot

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2022, 32(3), pp.115-120
DOI : 10.6111/JKCGCT.2022.32.3.115
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : June 2, 2022
Accepted : June 10, 2022
Published : June 30, 2022

Yoon Sung Jung ¹, Jae Ho Choi ¹, Kyung Won Min ², Young Min Byeon ², Won Bin Im ², Sung-Hun Noh ³, Nam-Hun Kang ³, Kim Hyeong Jun ⁴

¹한양대학교 신소재공학과
²한양대학교
³(주)SGC
⁴한국세라믹기술원

Accredited

ABSTRACT

A brown ring (hereinafter referred to as BR) on the inner surface of a quartz glass crucible used in the manufacturing process of a silicon ingot for semiconductor wafers was studied. BR is 20~30 µm in size and has an asymmetric brown ring shape. The size and distribution of BR were different depending on the crucible location, and the size and distribution of BR were the largest and most abundant in the round part with the highest crucible temperature during Si ingot growth. BR contains cristobalite, which has a higher coefficient of thermal expansion than quartz glass, so it is considered that surface cracks appear. The color development of BR and pin holes are presumed to be due to oxygen vacancies.

KEYWORDS

Quartz crucible, Brownish ring, Quartz glass, Color centered, Cristobalite

Citation status

* References for papers published after 2023 are currently being built.

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

A study on the brownish ring of quartz glass crucible for silicon single crystal ingot

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* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

A study on the brownish ring of quartz glass crucible for silicon single crystal ingot

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KEYWORDS

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