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Mechanical evaluation of SiC-graphite interface of seed crystal module for growing SiC single crystals

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2022, 32(5), pp.212-217
  • DOI : 10.6111/JKCGCT.2022.32.5.212
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering
  • Received : August 23, 2022
  • Accepted : September 22, 2022
  • Published : October 31, 2022

Jooe-Hyuk Kang 1 Yong-Hyeon Kim 1 SHIN Yunji 1 Si-Young Bae ORD ID 1 Yeon-Suk Jang 2 Lee, Won Jae 2 Seongmin Jeong ORD ID 1

1한국세라믹기술원
2동의대학교

Accredited

ABSTRACT

Large thermal stress due to the difference between silicon carbide and graphite’s coefficients of thermal expansion could be formed during crystal growing process of silicon carbide (SiC) at high temperature. The large thermal stress could separate the SiC seed crystals from graphite components, which bring about the drop of the seed crystal during crystal growth. However, the bonding properties of SiC seed crystal module has hardly reported so far. In this study, SiC and graphite were bonded using 3 types of bonding agents and a three-point bending tests using a mixed-mode flexure test were conducted for the bonded samples to evaluate the bonding characteristics between SiC and graphite. Raman spectroscopy, X-ray Photoelectron Spectroscopy, and X-ray Computed Tomography were used to analyze the bonding characteristics and the microstructures of the SiC-graphite interfaces bonded with the bonding agents. As results, an excellent bonding agent was chosen to fabricate SiC seed crystal module with 50 mm in diameter. An SiC single crystal with 50 mm in diameter was successfully grown without falling out during top seeded solution growth of SiC at high temperature.

Citation status

* References for papers published after 2023 are currently being built.