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Characteristics of Sn-doped β-Ga₂O₃single crystals grown by EFG method

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2023, 33(2), pp.83~90
  • DOI : 10.6111/JKCGCT.2023.33.2.083
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering
  • Received : March 13, 2023
  • Accepted : March 22, 2023
  • Published : April 30, 2023

Tae-Wan Je 1,  Su-Bin Park 1,  Hui-Yeon Jang 1,  Su-Min Choi 1,  Mi-Seon Park 1,  Yeon-Suk Jang 1,  Won-Jae Lee 1,  Yoon-Gon Moon 2,  Jin-Ki Kang 3,  Yun-Ji Shin 4,  Si-Young Bae ORD ID 4

1동의대학교
2(주) 악셀 R & D 센터
3(주)악셀
4한국세라믹기술원

Accredited

ABSTRACT

The β-Ga2O3 has the most thermodynamically stable phase, a wide band gap of 4.8~4.9 eV and a high dielectric breakdown voltage of 8MV/cm. Due to such excellent electrical characteristics, this material as a power device material has been attracted much attention. Furthermore, the β-Ga2O3 has easy liquid phase growth method unlike materials such as SiC and GaN. However, since the grown pure β-Ga2O3 single crystal requires the intentionally controlled doping due to a low conductivity to be applied to a power device, the research on doping in β-Ga2O3 single crystal is definitely important. In this study, various source powders of un-doped, Sn 0.05 mol%, Sn 0.1 mol%, Sn 1.5 mol%, Sn 2 mol%, Sn 3 mol%-doped Ga2O3 were prepared by adding different mole ratios of SnO2 powder to Ga2O3 powder, and β-Ga2O3 single crystals were grown by using an edge-defined Film-fed Growth (EFG) method. The crystal direction, crystal quality, optical, and electrical properties of the grown β-Ga2O3 single crystal were analyzed according to the Sn dopant content, and the property variation of β-Ga2O3 single crystal according to the Sn doping were extensively investigated.

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This paper was written with support from the National Research Foundation of Korea.