@article{ART002971256},
author={Gyu Bin Lee and Kang, Seung-Min and Jae Ho Choi and Young Min Byeon and Kim Hyeong Jun},
title={Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2023},
volume={33},
number={3},
pages={91-96},
doi={10.6111/JKCGCT.2023.33.3.091}
TY - JOUR
AU - Gyu Bin Lee
AU - Kang, Seung-Min
AU - Jae Ho Choi
AU - Young Min Byeon
AU - Kim Hyeong Jun
TI - Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2023
VL - 33
IS - 3
PB - The Korea Association Of Crystal Growth, Inc.
SP - 91
EP - 96
SN - 1225-1429
AB - To verify the quality of bubbles during the use of quartz glass crucibles (QC), an appropriate accelerated testing method was proposed. The bubble state of discarded waste crucibles obtained from actual Czochralski (Cz) processes wasanalyzed, and optimal heat treatment conditions were suggested by varying temperature, pressure, and time using the QC test piece. By subjecting the samples to heat treatment at 1450°C, 0.4 Torr, and 40 hours, it was possible to control the bubble size and density to a similar level as those generated in the actual Cz process. In particular, by selecting a relatively lower pressure of 0.4 Torr compared to the typical range of 10~20 Torr applied in the Cz process, the time required for accelerated bubble formation testing could be reduced. However, it was determined that increasing the heat treatment temperature to 1550°C led to the phenomenon of Ostwald ripening, resulting in larger bubbles and a rapid decrease in density. Therefore, it was concluded that it was not a suitable condition for the desired bake test.
KW - Quartz glass crucible;Bubble;Silicon ingot;Czochralski process;Accelerated test
DO - 10.6111/JKCGCT.2023.33.3.091
ER -
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon and Kim Hyeong Jun. (2023). Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots. Journal of the Korean Crystal Growth and Crystal Technology, 33(3), 91-96.
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon and Kim Hyeong Jun. 2023, "Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots", Journal of the Korean Crystal Growth and Crystal Technology, vol.33, no.3 pp.91-96. Available from: doi:10.6111/JKCGCT.2023.33.3.091
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon, Kim Hyeong Jun "Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots" Journal of the Korean Crystal Growth and Crystal Technology 33.3 pp.91-96 (2023) : 91.
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon, Kim Hyeong Jun. Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots. 2023; 33(3), 91-96. Available from: doi:10.6111/JKCGCT.2023.33.3.091
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon and Kim Hyeong Jun. "Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots" Journal of the Korean Crystal Growth and Crystal Technology 33, no.3 (2023) : 91-96.doi: 10.6111/JKCGCT.2023.33.3.091
Gyu Bin Lee; Kang, Seung-Min; Jae Ho Choi; Young Min Byeon; Kim Hyeong Jun. Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots. Journal of the Korean Crystal Growth and Crystal Technology, 33(3), 91-96. doi: 10.6111/JKCGCT.2023.33.3.091
Gyu Bin Lee; Kang, Seung-Min; Jae Ho Choi; Young Min Byeon; Kim Hyeong Jun. Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots. Journal of the Korean Crystal Growth and Crystal Technology. 2023; 33(3) 91-96. doi: 10.6111/JKCGCT.2023.33.3.091
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon, Kim Hyeong Jun. Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots. 2023; 33(3), 91-96. Available from: doi:10.6111/JKCGCT.2023.33.3.091
Gyu Bin Lee, Kang, Seung-Min, Jae Ho Choi, Young Min Byeon and Kim Hyeong Jun. "Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots" Journal of the Korean Crystal Growth and Crystal Technology 33, no.3 (2023) : 91-96.doi: 10.6111/JKCGCT.2023.33.3.091
