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Rapid chemical vapor deposition of graphene using methanol as a precursor

  • Carbon Letters
  • Abbr : Carbon Lett.
  • 2021, 31(2), pp.307-313
  • DOI : 10.1007/s42823-020-00166-6
  • Publisher : Korean Carbon Society
  • Research Area : Natural Science > Natural Science General > Other Natural Sciences General
  • Received : April 22, 2020
  • Accepted : July 11, 2020
  • Published : April 1, 2021

Lee Imbok 1 Nam Jungtae 2 Park Sang Jun 1 Bae Dong Jae 1 Hong Suklyun 1 Kim Keun Soo 1

1Sejong University
2한국과학기술연구원 탄소융합소재연구소

Accredited

ABSTRACT

In this study, graphene was rapidly grown by chemical vapor deposition using a liquid cell for supplying methanol as a carbon source of graphene. To realize the rapid growth, methanol which is carbon-contained organic solvent was used instead of methane gas, a widely used carbon source for graphene growth. The graphene grown with the growth time as a variable was transferred to a SiO2/Si substrate with an oxide thickness of 300 nm to confirm whether it was grown with full coverage with an optical microscope. The results confirmed a full coverage in 0.5 min of growth. The Raman spectra also confirmed the G-peak position at 1585.0 cm−1 and an intensity ratio of 2D/G at 2.3 or higher. Concerning electrical transport characteristics, at an induced carrier density of 1 × 1012 cm−2, the hole (µh) and electron (µe) mobilities were 1524 cm2 V−1 s−1 and 1528 cm2 V−1 s−1, respectively. Thus, our study confirmed that high-quality, large-area graphene can be grown within 0.5 min.

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Total Citation Counts(KCI+WOS) (8) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (8) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)

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