LiCoO2 thin film have received attention as cathodes of thin-film microbatteries. In this study, LiCoO2 thin filmswere synthesized on Au substrates by sol-gel spin coating method and electrochemical properties were investigated underannealing temperature and time. The phycochemical properties of LiCoO2 thin film were investigated by X-ray diffraction,scaning electron microscopy and atomic force microscopy. The electrochemical properties were characterized usinggalvanostatic charging/discharging cycling tests. From X-ray diffraction, as-grown films annealed at 550oC and 750oC arepresumed to be spinel structure and a single phase of the layered-rock-salt, respectively. The RMS roughness and grain sizeof the films which annealed at 750oC has similar values for annealing time 10 and 30 min, while for annealing time120 min surface roughness, grain size increase and pore appearance were observed. The first discharge capacity of LiCoO2thin films annealed at 750oC for 10, 30 and 120 min is about 54.5, 56.8 and 51.87 μAh/cm2μm, respectively. Correspondingcapacity retention at 50th cycle is 97.25, 76.69, 77.19%.