@article{ART000933485},
author={Park Chi Sun},
title={Electrical charateristics of MIS BST thin films},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2004},
volume={14},
number={3},
pages={90-94}
TY - JOUR
AU - Park Chi Sun
TI - Electrical charateristics of MIS BST thin films
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2004
VL - 14
IS - 3
PB - The Korea Association Of Crystal Growth, Inc.
SP - 90
EP - 94
SN - 1225-1429
AB - The variation of electrical properties of (Ba,Sr)TiO3 [BST] thin films for Metal-Insulator-Semiconductor (MIS)capacitors was investigated. BST thin films were deposited on p-Si(10) substrates by the RF magnetron sputtering withtemperature range of 500~600oC. The dielectric properties of MIS capacitors consisting of Al/BST/SiO2/Si sandwichstructure were measured for various conditions. We examined the characteristics of MIS capacitor with various oxygenpressure, substrate temperature and (Ba+Sr)/Ti ratio. It was found that the leakage curent was reduced in MIS capacitorwith high quality SiO2 layer was grown on bare p-Si substrate by thermal oxidation. The BST MIS structure showedrelatively high capacitance even though it is the combination of high-dielectric BST thin films and SiO2 layer. The chargestate densities of the MIS capacitors and Current-voltage characteristics of the MIS capacitor were investigated. By applyingSiO2 layer between BST thin films and Si substrate, low leakage current of 10-10 order was observed.
KW - Capacitor;BIS;Thin film;MIS
DO -
UR -
ER -
Park Chi Sun. (2004). Electrical charateristics of MIS BST thin films. Journal of the Korean Crystal Growth and Crystal Technology, 14(3), 90-94.
Park Chi Sun. 2004, "Electrical charateristics of MIS BST thin films", Journal of the Korean Crystal Growth and Crystal Technology, vol.14, no.3 pp.90-94.
Park Chi Sun "Electrical charateristics of MIS BST thin films" Journal of the Korean Crystal Growth and Crystal Technology 14.3 pp.90-94 (2004) : 90.
Park Chi Sun. Electrical charateristics of MIS BST thin films. 2004; 14(3), 90-94.
Park Chi Sun. "Electrical charateristics of MIS BST thin films" Journal of the Korean Crystal Growth and Crystal Technology 14, no.3 (2004) : 90-94.
Park Chi Sun. Electrical charateristics of MIS BST thin films. Journal of the Korean Crystal Growth and Crystal Technology, 14(3), 90-94.
Park Chi Sun. Electrical charateristics of MIS BST thin films. Journal of the Korean Crystal Growth and Crystal Technology. 2004; 14(3) 90-94.
Park Chi Sun. Electrical charateristics of MIS BST thin films. 2004; 14(3), 90-94.
Park Chi Sun. "Electrical charateristics of MIS BST thin films" Journal of the Korean Crystal Growth and Crystal Technology 14, no.3 (2004) : 90-94.
