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Growth and characteristics of HVPE thick a-plane GaN layers

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2007, 17(1), pp.1-5
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

이충현 1 Min Yang 1 Kyoung Hwa Kim 1 Hyung Soo Ahn 1 Jong Seong Bae 2 SUNLYEONG HWANG 1 장근숙 1 Hunsoo Jeon 1 Kim Suck Whan 3 장성환 4 이수민 4 박길한 4 M. Koike 4

1한국해양대학교
2한국기초과학지원연구원
3안동대학교
4삼성전기

Accredited

ABSTRACT

The structural and morphological properties of planar, nonpolar (11-20) a-plane GaN layers grown by hydride vapor phase epitaxy on (1-102) r-plane sapphire substrates are characterized. We report on the effect of low temperature (500/550/600/660 oC) AlN buffer layers on the structural properties of HVPE grown a-GaN layers. And for the comparison, low temperature GaN and InGaN buffer layers are also tried for the growth of a-plane GaN layers. The structural geometry of a-GaN layers is severely affected on the growth condition of low temperature buffer layers. The most planar a-GaN could be obtained with GaCl3 pretreatment at the growth temperature of 820oC.

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