본문 바로가기
  • Home

Growth and characteristics of HVPE thick a-plane GaN layers

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2007, 17(1), pp.1~5
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

이충현 1,  Min Yang 1,  Kyoung Hwa Kim 1,  Hyung Soo Ahn 1,  Jong Seong Bae 2,  SUNLYEONG HWANG 1,  장근숙 1,  Hunsoo Jeon 1,  Kim Suck Whan 3,  장성환 4,  이수민 4,  박길한 4,  M. Koike 4

1한국해양대학교
2한국기초과학지원연구원
3안동대학교
4삼성전기

Accredited

ABSTRACT

The structural and morphological properties of planar, nonpolar (11-20) a-plane GaN layers grown by hydride vapor phase epitaxy on (1-102) r-plane sapphire substrates are characterized. We report on the effect of low temperature (500/550/600/660 oC) AlN buffer layers on the structural properties of HVPE grown a-GaN layers. And for the comparison, low temperature GaN and InGaN buffer layers are also tried for the growth of a-plane GaN layers. The structural geometry of a-GaN layers is severely affected on the growth condition of low temperature buffer layers. The most planar a-GaN could be obtained with GaCl3 pretreatment at the growth temperature of 820oC.

Journal Copyright Policy

BY-NC 아이콘

This license enables reusers to distribute, remix, adapt, and build upon the material in any medium or format for noncommercial purposes only, and only so long as attribution is given to the creator.

Citation status

* References for papers published after 2025 are currently being built.