@article{ART001113191},
author={정연진 and 이건영 and 이호진 and Choe Jean Il},
title={The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2004},
volume={14},
number={1},
pages={6-11}
TY - JOUR
AU - 정연진
AU - 이건영
AU - 이호진
AU - Choe Jean Il
TI - The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2004
VL - 14
IS - 1
PB - The Korea Association Of Crystal Growth, Inc.
SP - 6
EP - 11
SN - 1225-1429
AB - The characteristics of interface layer and the effect of bias voltages on the nucleation density and hetroepitaxial
growth of diamond films were studied in the hot filament CVD diamond process. Diamond films were deposited on a high
speed steel (SKH-51) substrate by bias-assisted hot filament CVD technique with a titanium interlayer. The bias applied for
enhancing the emission of electrons from the filament increased the nucleation density and achieving heteroepitaxial growth
of CVD diamond. Diamond films obtained at a gas pressure of 20 torr; a bias voltage of 200 V and a substrate temperature
of 700oC. Titanium was a suitable element as an interlayer for the diamond deposition on steel because it has high
diffusivity of Fe and C as a carbide forming element.
KW - Bias voltage;Nucleation density;Diamond films;EACVD;Titanium interlayer;Diffusivity
DO -
UR -
ER -
정연진, 이건영, 이호진 and Choe Jean Il. (2004). The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process. Journal of the Korean Crystal Growth and Crystal Technology, 14(1), 6-11.
정연진, 이건영, 이호진 and Choe Jean Il. 2004, "The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process", Journal of the Korean Crystal Growth and Crystal Technology, vol.14, no.1 pp.6-11.
정연진, 이건영, 이호진, Choe Jean Il "The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process" Journal of the Korean Crystal Growth and Crystal Technology 14.1 pp.6-11 (2004) : 6.
정연진, 이건영, 이호진, Choe Jean Il. The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process. 2004; 14(1), 6-11.
정연진, 이건영, 이호진 and Choe Jean Il. "The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process" Journal of the Korean Crystal Growth and Crystal Technology 14, no.1 (2004) : 6-11.
정연진; 이건영; 이호진; Choe Jean Il. The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process. Journal of the Korean Crystal Growth and Crystal Technology, 14(1), 6-11.
정연진; 이건영; 이호진; Choe Jean Il. The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process. Journal of the Korean Crystal Growth and Crystal Technology. 2004; 14(1) 6-11.
정연진, 이건영, 이호진, Choe Jean Il. The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process. 2004; 14(1), 6-11.
정연진, 이건영, 이호진 and Choe Jean Il. "The formation of diamond films on high speed steel with a titanium interlayer by electron-assisted CVD process" Journal of the Korean Crystal Growth and Crystal Technology 14, no.1 (2004) : 6-11.
