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Characterizations of GaN polarity controlled by substrate using the hydride vapor phase epitaxy (HVPE)technique

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2008, 18(3), pp.97~100
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

오동근 1,  Bonggeun Choi 1,  Kwang Bo Shim 1,  Sung Yi 1,  정진현 2,  이성국 1,  Van Thi Ha Lai 1

1한양대학교
2유니모테크놀로지

Accredited

ABSTRACT

Polar and non-polar GaN was grown by the HVPE on various substrates and influence of polarity has been investigated. The 10 μm thickness GaN were grown by HVPE is along A-plane (1120), C-plane (0001) and M-Plane (1010) sapphire substrate respectively. Surface properties were observed by optical microscope and atomic force microscopy. High resolution X-ray diffraction (HR-XRD) confirms the wurtzite structure. The donor band exciton peak located at ~3.4 eV and also located yellow luminescence peak at 2.2 eV. The polarity of the GaN film has a strong influence on the morphology and the optical properties.

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