Effects of antimony addition on growth of InGaN nano-structures by mixed-source HVPE (혼합소스 HVPE 방법에 의한 InGaN 나노구조의 성장에 있어서 Sb 첨가의 영향)

옥진은; 조동완; Hunsoo Jeon (전헌수); 이아름; Gang Seok Lee (이강석); Cho Youngji (조영지); Kyoung Hwa Kim (김경화); JIho Chang (장지호); Hyung Soo Ahn (안형수); Min Yang (양민)

Effects of antimony addition on growth of InGaN nano-structures by mixed-source HVPE

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2010, 20(3), pp.113-116
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering

옥진은 ¹, 조동완 ¹, Hunsoo Jeon ¹, 이아름 ¹, Gang Seok Lee ¹, Cho Youngji ¹, Kyoung Hwa Kim ¹, JIho Chang ¹, Hyung Soo Ahn ¹, Min Yang ¹

¹한국해양대학교

Accredited

ABSTRACT

We report on the growth and characteristics of the structural and optical properties of InGaN nano-structures doped with antimony (Sb) as a catalyst. The use of catalyst has been explored to modify the growth and defect generation during strained layer heteroepitaxial growth. We performed the growth of the InGaN nano-structures on c-sapphire substrates using mixed-source hydride vapor phase epitaxy (HVPE). The characteristic of samples was measured by scanning electron microscope (SEM) and photoluminescence (PL). The aligning direction of c-axis of the InGaN nanostructures was changed from vertical to parallel or inclined to the surface of substrates when the Sb was added as a catalyst. The indium composition was estimated about 3.2 % in both cases of with or without the addition of Sb in the InxGa1-xN structures. From the results of InGaN nano-structures formed with the addition of Sb, we can expect the performance of optical devices would be more improved by reduced piezo-electric field if we use the InGaN nanostructures of which c-axes are aligned parallel to the substrates as an active layer.

KEYWORDS

InGaN, HVPE, Mixed-source, Nano-structures, Antimony, Catalyst

Citation status

* References for papers published after 2023 are currently being built.

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This paper was written with support from the National Research Foundation of Korea.

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19