@article{ART001562004},
author={Wi Il Yun and 조동완 and 옥진은 and Hunsoo Jeon and Gang Seok Lee and Se-Gyo Jung and Seon Min Bae and Hyung Soo Ahn and Min Yang},
title={Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2011},
volume={21},
number={3},
pages={110-113}
TY - JOUR
AU - Wi Il Yun
AU - 조동완
AU - 옥진은
AU - Hunsoo Jeon
AU - Gang Seok Lee
AU - Se-Gyo Jung
AU - Seon Min Bae
AU - Hyung Soo Ahn
AU - Min Yang
TI - Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2011
VL - 21
IS - 3
PB - The Korea Association Of Crystal Growth, Inc.
SP - 110
EP - 113
SN - 1225-1429
AB - In this paper, we propose a new method for the fabrication of GaN microstructures formed only on the vertex of GaN pyramid by using of metal catalysts. GaN pyramidal structures were selectively grown on 3 μm SiO2 dot patterns followed by thin film deposition of Au and Cr only on the vertex area of the GaN pyramids with precisely controlled photolithography. After the metal deposition, the samples were loaded in the MOVPE reactor for the growth of GaN microstructures for 10 minutes. Temperature for the growth of the GaN microstructures was changed from 650oC to 750oC.
Rod type GaN microstructures were grown in the direction of vertical to the six {1-101} facets and the shape of the GaN microstructures was changed depend on the type of metal.
KW - GaN;MOCVD;Micro structure;Metal catalyst
DO -
UR -
ER -
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn and Min Yang. (2011). Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids. Journal of the Korean Crystal Growth and Crystal Technology, 21(3), 110-113.
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn and Min Yang. 2011, "Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids", Journal of the Korean Crystal Growth and Crystal Technology, vol.21, no.3 pp.110-113.
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang "Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids" Journal of the Korean Crystal Growth and Crystal Technology 21.3 pp.110-113 (2011) : 110.
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang. Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids. 2011; 21(3), 110-113.
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn and Min Yang. "Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids" Journal of the Korean Crystal Growth and Crystal Technology 21, no.3 (2011) : 110-113.
Wi Il Yun; 조동완; 옥진은; Hunsoo Jeon; Gang Seok Lee; Se-Gyo Jung; Seon Min Bae; Hyung Soo Ahn; Min Yang. Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids. Journal of the Korean Crystal Growth and Crystal Technology, 21(3), 110-113.
Wi Il Yun; 조동완; 옥진은; Hunsoo Jeon; Gang Seok Lee; Se-Gyo Jung; Seon Min Bae; Hyung Soo Ahn; Min Yang. Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids. Journal of the Korean Crystal Growth and Crystal Technology. 2011; 21(3) 110-113.
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang. Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids. 2011; 21(3), 110-113.
Wi Il Yun, 조동완, 옥진은, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn and Min Yang. "Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids" Journal of the Korean Crystal Growth and Crystal Technology 21, no.3 (2011) : 110-113.
