@article{ART001562010},
author={조동완 and 옥진은 and Wi Il Yun and Hunsoo Jeon and Gang Seok Lee and Se-Gyo Jung and Seon Min Bae and Hyung Soo Ahn and Min Yang and 이영철},
title={Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2011},
volume={21},
number={3},
pages={114-118}
TY - JOUR
AU - 조동완
AU - 옥진은
AU - Wi Il Yun
AU - Hunsoo Jeon
AU - Gang Seok Lee
AU - Se-Gyo Jung
AU - Seon Min Bae
AU - Hyung Soo Ahn
AU - Min Yang
AU - 이영철
TI - Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2011
VL - 21
IS - 3
PB - The Korea Association Of Crystal Growth, Inc.
SP - 114
EP - 118
SN - 1225-1429
AB - We report on the growth and characterization of nano and micro scale GaN structures selectively grown on the vertex of hexagonal GaN pyramids. SiO2 near the vertex of hexagonal GaN pyramids was removed by optimized photolithgraphy process and followed by a selective growth of nano and micro scale GaN structures by metal organic vapor phase epitaxy (MOVPE). The pyramidal GaN nano and micro structures which have crystal facets of semi-polar {1-101} facets were formed only on the vertex of GaN pyramids and the size of the selectively grown nano and micro GaN structures was easily controlled by growth time. As a result of TEM maesurement, Reduction of threading dislocation density was conformed by transmission electron microscopy (TEM) in the selectively grown nano and micro GaN structures. However, stacking faults were newly developed near the edge of SiO2 film because of the roughness and nonuniformity in thickness of the SiO2 film
KW - GaN;Nano/micro-structure;Selective area growth;Semi-polar
DO -
UR -
ER -
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang and 이영철. (2011). Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE. Journal of the Korean Crystal Growth and Crystal Technology, 21(3), 114-118.
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang and 이영철. 2011, "Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE", Journal of the Korean Crystal Growth and Crystal Technology, vol.21, no.3 pp.114-118.
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang, 이영철 "Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE" Journal of the Korean Crystal Growth and Crystal Technology 21.3 pp.114-118 (2011) : 114.
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang, 이영철. Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE. 2011; 21(3), 114-118.
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang and 이영철. "Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE" Journal of the Korean Crystal Growth and Crystal Technology 21, no.3 (2011) : 114-118.
조동완; 옥진은; Wi Il Yun; Hunsoo Jeon; Gang Seok Lee; Se-Gyo Jung; Seon Min Bae; Hyung Soo Ahn; Min Yang; 이영철. Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE. Journal of the Korean Crystal Growth and Crystal Technology, 21(3), 114-118.
조동완; 옥진은; Wi Il Yun; Hunsoo Jeon; Gang Seok Lee; Se-Gyo Jung; Seon Min Bae; Hyung Soo Ahn; Min Yang; 이영철. Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE. Journal of the Korean Crystal Growth and Crystal Technology. 2011; 21(3) 114-118.
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang, 이영철. Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE. 2011; 21(3), 114-118.
조동완, 옥진은, Wi Il Yun, Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Hyung Soo Ahn, Min Yang and 이영철. "Fabrication of semi-polar nano- and micro-scale GaN structures on the vertex of hexagonal GaN pyramids by MOVPE" Journal of the Korean Crystal Growth and Crystal Technology 21, no.3 (2011) : 114-118.
