@article{ART001562014},
author={Kim Sung-Hoon},
title={The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2011},
volume={21},
number={3},
pages={119-123}
TY - JOUR
AU - Kim Sung-Hoon
TI - The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2011
VL - 21
IS - 3
PB - The Korea Association Of Crystal Growth, Inc.
SP - 119
EP - 123
SN - 1225-1429
AB - Carbon nanofilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases under thermal chemical vapor deposition system. By the incorporation of SF6 as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nanosized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without SF6 incorporation were investigated. Diameter size reduction for the individual CNFs-related shape and the enhancement of the formation density of CNFs-related material could be achieved by the incorporation of SF6 as a cyclic modulation manner. The cause for these results was discussed in association with the slightly increased etching ability by SF6 addition and the sulfur role in SF6 for the geometry change.
KW - Carbon nanofilaments;Carbon coil;SF6;Geometry;Cyclic modulation process;Thermal chemical vapor deposition
DO -
UR -
ER -
Kim Sung-Hoon. (2011). The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system. Journal of the Korean Crystal Growth and Crystal Technology, 21(3), 119-123.
Kim Sung-Hoon. 2011, "The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system", Journal of the Korean Crystal Growth and Crystal Technology, vol.21, no.3 pp.119-123.
Kim Sung-Hoon "The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system" Journal of the Korean Crystal Growth and Crystal Technology 21.3 pp.119-123 (2011) : 119.
Kim Sung-Hoon. The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system. 2011; 21(3), 119-123.
Kim Sung-Hoon. "The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system" Journal of the Korean Crystal Growth and Crystal Technology 21, no.3 (2011) : 119-123.
Kim Sung-Hoon. The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system. Journal of the Korean Crystal Growth and Crystal Technology, 21(3), 119-123.
Kim Sung-Hoon. The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system. Journal of the Korean Crystal Growth and Crystal Technology. 2011; 21(3) 119-123.
Kim Sung-Hoon. The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system. 2011; 21(3), 119-123.
Kim Sung-Hoon. "The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system" Journal of the Korean Crystal Growth and Crystal Technology 21, no.3 (2011) : 119-123.
