@article{ART001851106},
author={김경인 and Sungchurl Choi and Han Kyu Sung and Kwangtaek Hwang and Kim Jinho},
title={Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2014},
volume={24},
number={1},
pages={1-7},
doi={10.6111/JKCGCT.2014.24.1.001}
TY - JOUR
AU - 김경인
AU - Sungchurl Choi
AU - Han Kyu Sung
AU - Kwangtaek Hwang
AU - Kim Jinho
TI - Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2014
VL - 24
IS - 1
PB - The Korea Association Of Crystal Growth, Inc.
SP - 1
EP - 7
SN - 1225-1429
AB - Aluminum nitride, which has outstanding properties such as high thermal conductivity and electrical resistivity,has been received a great attention as a substrate and packaging material of semiconductor devices. Since aluminum nitridehas a high sintering temperature of 2173 K and its properties depends on the impurity level, it is necessary to synthesizehigh-purity and nano-sized aluminum nitride powders for the applications. In this research, we synthesized high purityaluminum nitride nanopowders from aluminum using RF induction thermal plasma system. Sheath gas (NH3) flow wascontrolled to establish the synthesis condition of high purity aluminum nitride nanopowders. The obtained aluminum nitridenanopowders were evaluated by XRD, SEM, TEM, BET, FTIR and N-O analysis.
KW - Aluminum nitride;RF induction thermal plasma;Nanopowder;Ammonia gas flow
DO - 10.6111/JKCGCT.2014.24.1.001
ER -
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang and Kim Jinho. (2014). Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma. Journal of the Korean Crystal Growth and Crystal Technology, 24(1), 1-7.
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang and Kim Jinho. 2014, "Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma", Journal of the Korean Crystal Growth and Crystal Technology, vol.24, no.1 pp.1-7. Available from: doi:10.6111/JKCGCT.2014.24.1.001
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang, Kim Jinho "Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma" Journal of the Korean Crystal Growth and Crystal Technology 24.1 pp.1-7 (2014) : 1.
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang, Kim Jinho. Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma. 2014; 24(1), 1-7. Available from: doi:10.6111/JKCGCT.2014.24.1.001
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang and Kim Jinho. "Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma" Journal of the Korean Crystal Growth and Crystal Technology 24, no.1 (2014) : 1-7.doi: 10.6111/JKCGCT.2014.24.1.001
김경인; Sungchurl Choi; Han Kyu Sung; Kwangtaek Hwang; Kim Jinho. Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma. Journal of the Korean Crystal Growth and Crystal Technology, 24(1), 1-7. doi: 10.6111/JKCGCT.2014.24.1.001
김경인; Sungchurl Choi; Han Kyu Sung; Kwangtaek Hwang; Kim Jinho. Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma. Journal of the Korean Crystal Growth and Crystal Technology. 2014; 24(1) 1-7. doi: 10.6111/JKCGCT.2014.24.1.001
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang, Kim Jinho. Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma. 2014; 24(1), 1-7. Available from: doi:10.6111/JKCGCT.2014.24.1.001
김경인, Sungchurl Choi, Han Kyu Sung, Kwangtaek Hwang and Kim Jinho. "Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma" Journal of the Korean Crystal Growth and Crystal Technology 24, no.1 (2014) : 1-7.doi: 10.6111/JKCGCT.2014.24.1.001
