@article{ART002043287},
author={이승현 and Hyung Soo Ahn and Min Yang},
title={Selective area growth of micro-sized AlGaN array structures on GaN stripes},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2015},
volume={25},
number={5},
pages={182-187},
doi={10.6111/JKCGCT.2015.25.5.182}
TY - JOUR
AU - 이승현
AU - Hyung Soo Ahn
AU - Min Yang
TI - Selective area growth of micro-sized AlGaN array structures on GaN stripes
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2015
VL - 25
IS - 5
PB - The Korea Association Of Crystal Growth, Inc.
SP - 182
EP - 187
SN - 1225-1429
AB - The growth and characterization of micro sized AlGaN array structures selectively grown by metal organic chemical vapor deposition (MOCVD) on GaN stripes are reported. The shape of the AlGaN array structures depends on the size of exposed area for selective growth. The AlGaN array structures grown selectively on relatively large exposed area have regular shapes resembling those of the GaN stripes on the substrate, while samples selectively grown on relatively small exposed area have irregular shapes. The phonon frequency of the AlGaN array structures increases with increasing Al composition in the AlGaN structure. However, at relatively high Al composition (x = 0.28 in this research), the phonon frequency decreases slightly from the expected value not only because of large tensile strain associated with large differences between the lattice constants of the AlGaN structure and underlying GaN stripes but also changes of crystal facet direction during the selective growth.
KW - GaN;AlGaN;GaN stripe;Selective growth;AlGaN structure;MOCVD;Strain;Raman spectroscopy
DO - 10.6111/JKCGCT.2015.25.5.182
ER -
이승현, Hyung Soo Ahn and Min Yang. (2015). Selective area growth of micro-sized AlGaN array structures on GaN stripes. Journal of the Korean Crystal Growth and Crystal Technology, 25(5), 182-187.
이승현, Hyung Soo Ahn and Min Yang. 2015, "Selective area growth of micro-sized AlGaN array structures on GaN stripes", Journal of the Korean Crystal Growth and Crystal Technology, vol.25, no.5 pp.182-187. Available from: doi:10.6111/JKCGCT.2015.25.5.182
이승현, Hyung Soo Ahn, Min Yang "Selective area growth of micro-sized AlGaN array structures on GaN stripes" Journal of the Korean Crystal Growth and Crystal Technology 25.5 pp.182-187 (2015) : 182.
이승현, Hyung Soo Ahn, Min Yang. Selective area growth of micro-sized AlGaN array structures on GaN stripes. 2015; 25(5), 182-187. Available from: doi:10.6111/JKCGCT.2015.25.5.182
이승현, Hyung Soo Ahn and Min Yang. "Selective area growth of micro-sized AlGaN array structures on GaN stripes" Journal of the Korean Crystal Growth and Crystal Technology 25, no.5 (2015) : 182-187.doi: 10.6111/JKCGCT.2015.25.5.182
이승현; Hyung Soo Ahn; Min Yang. Selective area growth of micro-sized AlGaN array structures on GaN stripes. Journal of the Korean Crystal Growth and Crystal Technology, 25(5), 182-187. doi: 10.6111/JKCGCT.2015.25.5.182
이승현; Hyung Soo Ahn; Min Yang. Selective area growth of micro-sized AlGaN array structures on GaN stripes. Journal of the Korean Crystal Growth and Crystal Technology. 2015; 25(5) 182-187. doi: 10.6111/JKCGCT.2015.25.5.182
이승현, Hyung Soo Ahn, Min Yang. Selective area growth of micro-sized AlGaN array structures on GaN stripes. 2015; 25(5), 182-187. Available from: doi:10.6111/JKCGCT.2015.25.5.182
이승현, Hyung Soo Ahn and Min Yang. "Selective area growth of micro-sized AlGaN array structures on GaN stripes" Journal of the Korean Crystal Growth and Crystal Technology 25, no.5 (2015) : 182-187.doi: 10.6111/JKCGCT.2015.25.5.182