@article{ART002061637},
author={김기훈 and Kook-soo Bang and Dong-Soo Park and Chan Park},
title={Electrical properties of piezoelectric PZT thick film by aerosol deposition method},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2015},
volume={25},
number={6},
pages={239-244},
doi={10.6111/JKCGCT.2015.25.6.239}
TY - JOUR
AU - 김기훈
AU - Kook-soo Bang
AU - Dong-Soo Park
AU - Chan Park
TI - Electrical properties of piezoelectric PZT thick film by aerosol deposition method
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2015
VL - 25
IS - 6
PB - The Korea Association Of Crystal Growth, Inc.
SP - 239
EP - 244
SN - 1225-1429
AB - Lead zirconate titanate (PZT) thick films with thickness of 10~20 μm were fabricated on silicon substrate by aerosol deposition method. As-deposited films on silicon were annealed at the temperatures of 700 o C. The electrical properties of films deposited by PZT powders were characterized using impedance analyzer and Sawyer-Tower circuit. The PZT powder was prepared by both conventional solid reaction process and sol-gel process. The remanent polarization, coercive field, and dielectric constant of the 10 μm thick film with solid reaction process were 20 μC/cm 2 , 30 kV/cm and 1320, respectively. On the other hand, the PZT films by sol-gel process showed a poor dielectric constant of 635. The reason was probably due to the presence of pores produced from organic residue during annealing.
KW - PZT powder;Sol-gel process;Aerosol deposition method;Dielectric constant;Piezoelectric coefficient;Hysteresis loop;Remnant polarization;Coercive field
DO - 10.6111/JKCGCT.2015.25.6.239
ER -
김기훈, Kook-soo Bang, Dong-Soo Park and Chan Park. (2015). Electrical properties of piezoelectric PZT thick film by aerosol deposition method. Journal of the Korean Crystal Growth and Crystal Technology, 25(6), 239-244.
김기훈, Kook-soo Bang, Dong-Soo Park and Chan Park. 2015, "Electrical properties of piezoelectric PZT thick film by aerosol deposition method", Journal of the Korean Crystal Growth and Crystal Technology, vol.25, no.6 pp.239-244. Available from: doi:10.6111/JKCGCT.2015.25.6.239
김기훈, Kook-soo Bang, Dong-Soo Park, Chan Park "Electrical properties of piezoelectric PZT thick film by aerosol deposition method" Journal of the Korean Crystal Growth and Crystal Technology 25.6 pp.239-244 (2015) : 239.
김기훈, Kook-soo Bang, Dong-Soo Park, Chan Park. Electrical properties of piezoelectric PZT thick film by aerosol deposition method. 2015; 25(6), 239-244. Available from: doi:10.6111/JKCGCT.2015.25.6.239
김기훈, Kook-soo Bang, Dong-Soo Park and Chan Park. "Electrical properties of piezoelectric PZT thick film by aerosol deposition method" Journal of the Korean Crystal Growth and Crystal Technology 25, no.6 (2015) : 239-244.doi: 10.6111/JKCGCT.2015.25.6.239
김기훈; Kook-soo Bang; Dong-Soo Park; Chan Park. Electrical properties of piezoelectric PZT thick film by aerosol deposition method. Journal of the Korean Crystal Growth and Crystal Technology, 25(6), 239-244. doi: 10.6111/JKCGCT.2015.25.6.239
김기훈; Kook-soo Bang; Dong-Soo Park; Chan Park. Electrical properties of piezoelectric PZT thick film by aerosol deposition method. Journal of the Korean Crystal Growth and Crystal Technology. 2015; 25(6) 239-244. doi: 10.6111/JKCGCT.2015.25.6.239
김기훈, Kook-soo Bang, Dong-Soo Park, Chan Park. Electrical properties of piezoelectric PZT thick film by aerosol deposition method. 2015; 25(6), 239-244. Available from: doi:10.6111/JKCGCT.2015.25.6.239
김기훈, Kook-soo Bang, Dong-Soo Park and Chan Park. "Electrical properties of piezoelectric PZT thick film by aerosol deposition method" Journal of the Korean Crystal Growth and Crystal Technology 25, no.6 (2015) : 239-244.doi: 10.6111/JKCGCT.2015.25.6.239
