Thermal shock behaviors of TiN coatings on Inconel 617 and Silicon wafer substrates with finite element analysis method

Ki-Seuk Lee (이기석); Seol Jeon (전설); Cho, Hyun (조현); Lee, Hee-Soo (이희수)

doi:10.6111/JKCGCT.2016.26.2.067

Thermal shock behaviors of TiN coatings on Inconel 617 and Silicon wafer substrates with finite element analysis method

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2016, 26(2), pp.67-73
DOI : 10.6111/JKCGCT.2016.26.2.067
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : March 21, 2016
Accepted : April 8, 2016
Published : April 30, 2016

Ki-Seuk Lee ¹, Seol Jeon ¹, Cho, Hyun ¹, Lee, Hee-Soo ¹

¹부산대학교

Accredited

ABSTRACT

The degradation behaviors of TiN coating layers under thermo-mechanical stress were investigated in terms of comparison of finite element analysis (FEA) and experimental data. The coating specimen was designed to quarter cylinder model, and the pulsed laser ablation was assumed as heat flux condition. The FEA results showed that heat accumulation at the center of the laser-ablated spot occurred and principle stress was concentrated at the lower region of the coating layer. The microstructural observation revealed that surface melting and decrease of the coating thickness occurred in the TiN/Inconel 617 and the interfacial cracks formed in the TiN/Si. The delamination was caused by the mechanical stress from the center to the outside of the ablated spot as the FEA results expected. It was considered that the improvement of the thermal shock resistance was attributed to higher thermal conductivity of Si wafer than that of Inconel 617.

KEYWORDS

TiN coating, Thermal shock behavior, Finite element analysis, Thermal conductivity

Citation status

* References for papers published after 2023 are currently being built.

[journal] 조현 / 2012 / High temperature properties of surface-modified Hastelloy X alloy / 한국결정성장학회지 / 한국결정성장학회 22(4) : 183~189

[journal] W. D. Münz / 1986 / Titanium aluminum nitride films: a new alternative to TiN coatings / J. Vac. Sci. Technol. A 4 : 2717~

[journal] O. Knotek / 1987 / Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum / J. Vac. Sci. Technol. A 5 : 2173~

[journal] A. Krella / 2007 / Influence of the substrate hardness on the cavitation erosion resistance of TiN coating / Wear 263 : 395~

[journal] T. Cselle / 1995 / Today’s applications and future developments of coatings for drills and rotating cutting tools / Surf. Coat. Technol 76(77) : 712~

[journal] B. Navinšek / 1992 / Improvement of cutting tools by TiN PVD hard coating / Mater. Manuf. Process 7 : 363~

[journal] M. T. Tilbrook / 2007 / Microstructural effects on indentation failure mechanisms in TiN coatings: Finite element simulations / Acta Mater 55 : 2489~

[journal] Y. Massiani / 1991 / Corrosion of sputtered titanium nitride films deposited on iron and stainless steel / Surf. Coat. Technol 45 : 115~

[journal] S. V. Hainsworth / 2003 / The effect of the substrate on the mechanical properties of TiN coatings / Surf. Coat. Technol 163 : 515~

[journal] J. H. Huang / 2002 / Effect of substrate bias on the structure and properties of ionplated ZrN on Si and stainless steel substrates / Mater. Chem. Phys 77 : 14~

[journal] Y. Choi / 2012 / Crack propagation behavior of TiN coatings by laser thermal shock experiments / Appl. Surf. Sci 258 : 8752~

[journal] S. Jeon / 2014 / Interfacial stability and diffusion barrier ability of Ti1 − xZrxN coatings by pulsed laser thermal shock / Appl. Surf. Sci 320 : 602~

[journal] S. Jeon / 2016 / Thermal shock behaviors of Ti1 − xZrxN coatings by accelerated test based on pulsed laser ablation / Ceram. Int 42 : 2241~

[journal] S. L. Soo / 2004 / 3D FE modelling of the cutting of Inconel 718 / J. Mater. Process. Technol 150 : 116~

[journal] E. Ceretti / 1999 / FEM simulation of orthogonal cutting : serrated chip formation / J. Mater. Process. Technol 95 : 17~

[journal] K. D. Bouzakis / 2011 / Influence of dry micro-blasting grain quality on wear behavior of TiAlN coated tools / Wear 271 : 783~

[journal] P. Peyre / 2007 / FEM calculation of residual stresses induced by laser shock processing in stainless steels / Model. Simul. Mater. Sci. Eng 15 : 205~

[journal] J. H. Lee / 2007 / A laser-induced thermal spray printing process for phosphor layer deposition of PDP / J. Micromech. Microeng 17 : 258~

[journal] S. Jeon / 2014 / Degradation of TiAlN coatings by the accelerated life test using pulsed laser ablation / Ceram. Int 40 : 8677~

[journal] S. Jeon / 2014 / Degradation of TiN coatings on Inconel 617 and silicon wafer substrates under pulsed laser ablation / J. Mater. Eng. Perform 23 : 1651~

[journal] K. Ding / 2003 / FEM simulation of two sided laser shock peening of thin sections of Ti-6Al-4V alloy / Surf. Eng 19 : 127~

[journal] N. A. Sakharova / 2010 / Influence of ductile interlayers on mechanical behavior of hard coatings under depth-sensing indentation : a numerical study on TiAlN / J. Mater. Sci 45 : 3812~

[journal] D. Stone / 1991 / Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation / J. Vac. Sci. Technol. A 9 : 2543~

[journal] Nokun Seo / 2014 / Interfacial Characteristics of TiN Coatings on SUS304 and Silicon Wafer Substrates with Pulsed Laser Thermal Shock / 대한금속·재료학회지 / 대한금속·재료학회 52(1) : 81~85

[journal] Q. Lu / 2002 / Delayed phase explosion during high-power nanosecond laser ablation of silicon / Appl. Phys. Lett 80 : 3072~

[journal] J. Haider / 2005 / Simulation of thermal stress in magnetron sputtered thin coating by finite element analysis / J. Mater. Process. Technol 168 : 36~

[journal] H. Oettel / 1995 / Residual stresses in PVD hard coatings / Surf. Coat. Technol 76(77) : 265~

[journal] M. Bielawski / 2006 / Residual stress control in TiN/Si coatings deposited by unbalanced magnetron sputtering / Surf. Coat. Technol 200 : 3987~

[journal] C. Kirchlechner / 2010 / Residual stresses and thermal fatigue in CrN hard coatings characterized by high-temperature synchrotron X-ray diffraction / Thin Solid Films 518 : 2090~

KJCKorea
Journal Central

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Thermal shock behaviors of TiN coatings on Inconel 617 and Silicon wafer substrates with finite element analysis method

ABSTRACT

KEYWORDS

Citation status

* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Thermal shock behaviors of TiN coatings on Inconel 617 and Silicon wafer substrates with finite element analysis method

ABSTRACT

KEYWORDS

Statistics

Tools

Issue List

Citation status

KCI Citation Counts (0)

REFERENCES (29) * References for papers published after 2023 are currently being built.

Search PDF

Citation

* References for papers published after 2023 are currently being built.