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Effect of PZN addition on microstructure of PZT thick films by aerosol deposition process

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2018, 28(1), pp.14-20
  • DOI : 10.6111/JKCGCT.2018.28.1.014
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering
  • Published : February 28, 2018

Joo-Hee Jang 1 Yoon-Soo Park 1 Dong-Soo Park 2 Chan Park 1

1부경대학교
2재료연구소

Accredited

ABSTRACT

Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of 5~10 μm were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents of PZN were varied from 0 %, 20 % and 40 %. The initial particles (PZT, 2PZN-8PZT, 4PZN-6PZT) had irregular shape and submicron sizes. The asdeposited film had fairly dense microstructure without any crack, and showed only a perovskite single phase formed with nano-sized grains. The as-deposited films on silicon were annealed at the temperatures of 700 o C, and the films deposited on sapphire were annealed at 900 o C in the electrical furnace. The effects of PZN addition on the microstructural evolution were observed using by FE-SEM and HR-TEM.

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