@article{ART002318001},
author={Hee Ae Lee and Jae Hwa Park and Jung Hun Lee and Joo Hyung Lee and Cheol Woo Park and Hyo Sang Kang and Suk Hyun Kang and Jun Hyeong In and Kwang Bo Shim},
title={Variation of optical characteristics with the thickness of bulk GaN grown by HVPE},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2018},
volume={28},
number={1},
pages={9-13},
doi={10.6111/JKCGCT.2018.28.1.009}
TY - JOUR
AU - Hee Ae Lee
AU - Jae Hwa Park
AU - Jung Hun Lee
AU - Joo Hyung Lee
AU - Cheol Woo Park
AU - Hyo Sang Kang
AU - Suk Hyun Kang
AU - Jun Hyeong In
AU - Kwang Bo Shim
TI - Variation of optical characteristics with the thickness of bulk GaN grown by HVPE
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2018
VL - 28
IS - 1
PB - The Korea Association Of Crystal Growth, Inc.
SP - 9
EP - 13
SN - 1225-1429
AB - In this work, we investigated the variation of optical characteristics with the thickness of bulk GaN grown by hydride vapor phase epitaxy(HVPE) to evaluate applicability as GaN substrates in fabrication of high-brightness optical devices and high-power devices. We fabricated 2-inch GaN substrates by using HVPE method of various thickness (0.4, 0.9, 1.5 mm) and characterized the optical property with the variation of defect density and the residual stress using chemical wet etching, Raman spectroscopy and photoluminescence. As a result, we confirmed the correlation of optical properties with GaN crystal thickness and applicability of high performance optical devices via fabrication of homoepitaxial substrate.
KW - Bulk GaN;Thickness;Optical property;Defect density;Residual stress
DO - 10.6111/JKCGCT.2018.28.1.009
ER -
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In and Kwang Bo Shim. (2018). Variation of optical characteristics with the thickness of bulk GaN grown by HVPE. Journal of the Korean Crystal Growth and Crystal Technology, 28(1), 9-13.
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In and Kwang Bo Shim. 2018, "Variation of optical characteristics with the thickness of bulk GaN grown by HVPE", Journal of the Korean Crystal Growth and Crystal Technology, vol.28, no.1 pp.9-13. Available from: doi:10.6111/JKCGCT.2018.28.1.009
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In, Kwang Bo Shim "Variation of optical characteristics with the thickness of bulk GaN grown by HVPE" Journal of the Korean Crystal Growth and Crystal Technology 28.1 pp.9-13 (2018) : 9.
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In, Kwang Bo Shim. Variation of optical characteristics with the thickness of bulk GaN grown by HVPE. 2018; 28(1), 9-13. Available from: doi:10.6111/JKCGCT.2018.28.1.009
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In and Kwang Bo Shim. "Variation of optical characteristics with the thickness of bulk GaN grown by HVPE" Journal of the Korean Crystal Growth and Crystal Technology 28, no.1 (2018) : 9-13.doi: 10.6111/JKCGCT.2018.28.1.009
Hee Ae Lee; Jae Hwa Park; Jung Hun Lee; Joo Hyung Lee; Cheol Woo Park; Hyo Sang Kang; Suk Hyun Kang; Jun Hyeong In; Kwang Bo Shim. Variation of optical characteristics with the thickness of bulk GaN grown by HVPE. Journal of the Korean Crystal Growth and Crystal Technology, 28(1), 9-13. doi: 10.6111/JKCGCT.2018.28.1.009
Hee Ae Lee; Jae Hwa Park; Jung Hun Lee; Joo Hyung Lee; Cheol Woo Park; Hyo Sang Kang; Suk Hyun Kang; Jun Hyeong In; Kwang Bo Shim. Variation of optical characteristics with the thickness of bulk GaN grown by HVPE. Journal of the Korean Crystal Growth and Crystal Technology. 2018; 28(1) 9-13. doi: 10.6111/JKCGCT.2018.28.1.009
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In, Kwang Bo Shim. Variation of optical characteristics with the thickness of bulk GaN grown by HVPE. 2018; 28(1), 9-13. Available from: doi:10.6111/JKCGCT.2018.28.1.009
Hee Ae Lee, Jae Hwa Park, Jung Hun Lee, Joo Hyung Lee, Cheol Woo Park, Hyo Sang Kang, Suk Hyun Kang, Jun Hyeong In and Kwang Bo Shim. "Variation of optical characteristics with the thickness of bulk GaN grown by HVPE" Journal of the Korean Crystal Growth and Crystal Technology 28, no.1 (2018) : 9-13.doi: 10.6111/JKCGCT.2018.28.1.009
