@article{ART002318514},
author={Jung Hun Lee and Cheol Woo Park and Jae Hwa Park and Hyo Sang Kang and Suk Hyun Kang and Hee Ae Lee and Joo Hyung Lee and Jun Hyeong In and Kang, Seung-Min and Kwang Bo Shim},
title={Optimization of chemical mechanical polishing for bulk AlN single crystal surface},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2018},
volume={28},
number={1},
pages={51-56},
doi={10.6111/JKCGCT.2018.28.1.051}
TY - JOUR
AU - Jung Hun Lee
AU - Cheol Woo Park
AU - Jae Hwa Park
AU - Hyo Sang Kang
AU - Suk Hyun Kang
AU - Hee Ae Lee
AU - Joo Hyung Lee
AU - Jun Hyeong In
AU - Kang, Seung-Min
AU - Kwang Bo Shim
TI - Optimization of chemical mechanical polishing for bulk AlN single crystal surface
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2018
VL - 28
IS - 1
PB - The Korea Association Of Crystal Growth, Inc.
SP - 51
EP - 56
SN - 1225-1429
AB - To evaluate surface characteristics of AlN single crystal grown by physical vapor transport (PVT) method, chemical mechanical polishing (CMP) were performed with diamond slurry and SiO2 slurry after mechanical polishing (MP), then the surface morphology and analysis of polishing characteristics of the slurry types were analyzed. To estimate how pH of slurry effects polishing process, pH of SiO2 slurry was controlled, the results from estimating the effect of zeta potential and MRR (material removal rate) were compared in accordance with each pH via zeta potential analyzer.
Eventually, surface roughness RMS (0.2 nm) could be derived with atomic force microscope (AFM).
KW - Aluminum nitride;Chemical mechanical polishing
DO - 10.6111/JKCGCT.2018.28.1.051
ER -
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min and Kwang Bo Shim. (2018). Optimization of chemical mechanical polishing for bulk AlN single crystal surface. Journal of the Korean Crystal Growth and Crystal Technology, 28(1), 51-56.
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min and Kwang Bo Shim. 2018, "Optimization of chemical mechanical polishing for bulk AlN single crystal surface", Journal of the Korean Crystal Growth and Crystal Technology, vol.28, no.1 pp.51-56. Available from: doi:10.6111/JKCGCT.2018.28.1.051
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min, Kwang Bo Shim "Optimization of chemical mechanical polishing for bulk AlN single crystal surface" Journal of the Korean Crystal Growth and Crystal Technology 28.1 pp.51-56 (2018) : 51.
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min, Kwang Bo Shim. Optimization of chemical mechanical polishing for bulk AlN single crystal surface. 2018; 28(1), 51-56. Available from: doi:10.6111/JKCGCT.2018.28.1.051
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min and Kwang Bo Shim. "Optimization of chemical mechanical polishing for bulk AlN single crystal surface" Journal of the Korean Crystal Growth and Crystal Technology 28, no.1 (2018) : 51-56.doi: 10.6111/JKCGCT.2018.28.1.051
Jung Hun Lee; Cheol Woo Park; Jae Hwa Park; Hyo Sang Kang; Suk Hyun Kang; Hee Ae Lee; Joo Hyung Lee; Jun Hyeong In; Kang, Seung-Min; Kwang Bo Shim. Optimization of chemical mechanical polishing for bulk AlN single crystal surface. Journal of the Korean Crystal Growth and Crystal Technology, 28(1), 51-56. doi: 10.6111/JKCGCT.2018.28.1.051
Jung Hun Lee; Cheol Woo Park; Jae Hwa Park; Hyo Sang Kang; Suk Hyun Kang; Hee Ae Lee; Joo Hyung Lee; Jun Hyeong In; Kang, Seung-Min; Kwang Bo Shim. Optimization of chemical mechanical polishing for bulk AlN single crystal surface. Journal of the Korean Crystal Growth and Crystal Technology. 2018; 28(1) 51-56. doi: 10.6111/JKCGCT.2018.28.1.051
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min, Kwang Bo Shim. Optimization of chemical mechanical polishing for bulk AlN single crystal surface. 2018; 28(1), 51-56. Available from: doi:10.6111/JKCGCT.2018.28.1.051
Jung Hun Lee, Cheol Woo Park, Jae Hwa Park, Hyo Sang Kang, Suk Hyun Kang, Hee Ae Lee, Joo Hyung Lee, Jun Hyeong In, Kang, Seung-Min and Kwang Bo Shim. "Optimization of chemical mechanical polishing for bulk AlN single crystal surface" Journal of the Korean Crystal Growth and Crystal Technology 28, no.1 (2018) : 51-56.doi: 10.6111/JKCGCT.2018.28.1.051
