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@article{ART002339906},
author={Sang Hun Park and Seoyoung Lee and Hyung Soo Ahn and Young-Moon Yu and Min Yang},
title={The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2018},
volume={28},
number={2},
pages={57-62},
doi={10.6111/JKCGCT.2018.28.2.057}

TY - JOUR
AU - Sang Hun Park
AU - Seoyoung Lee
AU - Hyung Soo Ahn
AU - Young-Moon Yu
AU - Min Yang
TI - The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2018
VL - 28
IS - 2
PB - The Korea Association Of Crystal Growth, Inc.
SP - 57
EP - 62
SN - 1225-1429
AB - In this study, we investigated the impurity effect of Ga2O3 doped thin film by simple doping method using Mg acetate solution. Both undoped Ga2O3 thin films and Mg-doped Ga2O3 thin films were grown on Si substrates at 600 and 900 o C for 30 minutes by means of a customized MOCVD method. As a result of the surface analysis, there were no obvious morphological differences by Mg impurity implantation. The surface of the thin film grown at 900 o C was rougher than those grown at 600 o C and polycrystallization was achieved. As a result of the optical property analysis, in the case of the doped sample, the overall emission peak was red shifted and the UV radiation intensity was increased. As a result of the I-V curve, the leakage current of the 600 o C growth thin film decreased by the Mg impurity and the photocurrent of the growth thin film of 900 o C increased.
KW - MOCVD;Ga2O3;Impurities;Optical properties;p-Type
DO - 10.6111/JKCGCT.2018.28.2.057
ER -

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu and Min Yang. (2018). The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD. Journal of the Korean Crystal Growth and Crystal Technology, 28(2), 57-62.

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu and Min Yang. 2018, "The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD", Journal of the Korean Crystal Growth and Crystal Technology, vol.28, no.2 pp.57-62. Available from: doi:10.6111/JKCGCT.2018.28.2.057

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu, Min Yang "The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD" Journal of the Korean Crystal Growth and Crystal Technology 28.2 pp.57-62 (2018) : 57.

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu, Min Yang. The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD. 2018; 28(2), 57-62. Available from: doi:10.6111/JKCGCT.2018.28.2.057

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu and Min Yang. "The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD" Journal of the Korean Crystal Growth and Crystal Technology 28, no.2 (2018) : 57-62.doi: 10.6111/JKCGCT.2018.28.2.057

Sang Hun Park; Seoyoung Lee; Hyung Soo Ahn; Young-Moon Yu; Min Yang. The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD. Journal of the Korean Crystal Growth and Crystal Technology, 28(2), 57-62. doi: 10.6111/JKCGCT.2018.28.2.057

Sang Hun Park; Seoyoung Lee; Hyung Soo Ahn; Young-Moon Yu; Min Yang. The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD. Journal of the Korean Crystal Growth and Crystal Technology. 2018; 28(2) 57-62. doi: 10.6111/JKCGCT.2018.28.2.057

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu, Min Yang. The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD. 2018; 28(2), 57-62. Available from: doi:10.6111/JKCGCT.2018.28.2.057

Sang Hun Park, Seoyoung Lee, Hyung Soo Ahn, Young-Moon Yu and Min Yang. "The effects of Mg impurities on β-Ga2O3 thin films grown by MOCVD" Journal of the Korean Crystal Growth and Crystal Technology 28, no.2 (2018) : 57-62.doi: 10.6111/JKCGCT.2018.28.2.057