KJCKorea
Journal Central

@article{ART002378173},
author={Jeoung Woon Kim and Si-Young Bae and Seongmin Jeong and Kang, Seung-Min and Sung Kang and Cheol-Jin Kim},
title={Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2018},
volume={28},
number={4},
pages={152-158},
doi={10.6111/JKCGCT.2018.28.4.152}

TY - JOUR
AU - Jeoung Woon Kim
AU - Si-Young Bae
AU - Seongmin Jeong
AU - Kang, Seung-Min
AU - Sung Kang
AU - Cheol-Jin Kim
TI - Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2018
VL - 28
IS - 4
PB - The Korea Association Of Crystal Growth, Inc.
SP - 152
EP - 158
SN - 1225-1429
AB - PVT (Physical Vapor Transport) method has advantages in producing high quality, large scale wafers where many researches are being carried out to commercialize nitride semiconductors. However, complex process variables cause various defects when it had non-equilibrium growth conditions. Annealing process after crystal growth has been widely used to enhance the crystallinity. It is important to set appropriate temperature, pressure, and annealing time to improve crystallinity effectively. In this study, the effect of the annealing conditions on the crystalline structure variation of the AlN single crystal grown by PVT method was investigated with synchrotron whitebeam X-ray topography, electron backscattered diffraction (EBSD), and Rietveld refinement. X-ray topography analysis showed secondary phases, sub-grains, impurities including carbon inclusion in the single crystal before annealing. EBSD analyses identified that sub-grains with slightly tilted basal plane appeared and the overall number of grains increased after the annealing process. Rietveld refinement showed that the stress caused by the temperature gradient during the annealing process between top and bottom in the hot zone not only causes distortion of grains but also changes the lattice constant.
KW - AlN;Annealing;EBSD;X-ray topography;Rietveld refinement
DO - 10.6111/JKCGCT.2018.28.4.152
ER -

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang and Cheol-Jin Kim. (2018). Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality. Journal of the Korean Crystal Growth and Crystal Technology, 28(4), 152-158.

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang and Cheol-Jin Kim. 2018, "Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality", Journal of the Korean Crystal Growth and Crystal Technology, vol.28, no.4 pp.152-158. Available from: doi:10.6111/JKCGCT.2018.28.4.152

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang, Cheol-Jin Kim "Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality" Journal of the Korean Crystal Growth and Crystal Technology 28.4 pp.152-158 (2018) : 152.

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang, Cheol-Jin Kim. Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality. 2018; 28(4), 152-158. Available from: doi:10.6111/JKCGCT.2018.28.4.152

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang and Cheol-Jin Kim. "Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality" Journal of the Korean Crystal Growth and Crystal Technology 28, no.4 (2018) : 152-158.doi: 10.6111/JKCGCT.2018.28.4.152

Jeoung Woon Kim; Si-Young Bae; Seongmin Jeong; Kang, Seung-Min; Sung Kang; Cheol-Jin Kim. Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality. Journal of the Korean Crystal Growth and Crystal Technology, 28(4), 152-158. doi: 10.6111/JKCGCT.2018.28.4.152

Jeoung Woon Kim; Si-Young Bae; Seongmin Jeong; Kang, Seung-Min; Sung Kang; Cheol-Jin Kim. Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality. Journal of the Korean Crystal Growth and Crystal Technology. 2018; 28(4) 152-158. doi: 10.6111/JKCGCT.2018.28.4.152

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang, Cheol-Jin Kim. Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality. 2018; 28(4), 152-158. Available from: doi:10.6111/JKCGCT.2018.28.4.152

Jeoung Woon Kim, Si-Young Bae, Seongmin Jeong, Kang, Seung-Min, Sung Kang and Cheol-Jin Kim. "Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality" Journal of the Korean Crystal Growth and Crystal Technology 28, no.4 (2018) : 152-158.doi: 10.6111/JKCGCT.2018.28.4.152