@article{ART002639484},
author={Jin Yong Park and Jeong-Hui Kim and Woo-Yeon Kim and Mi-Seon Park and Yeon-Suk Jang and Eunjin Jung and Jin-Ki Kang and Lee, Won Jae},
title={Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2020},
volume={30},
number={5},
pages={163-167},
doi={10.6111/JKCGCT.2020.30.5.163}
TY - JOUR
AU - Jin Yong Park
AU - Jeong-Hui Kim
AU - Woo-Yeon Kim
AU - Mi-Seon Park
AU - Yeon-Suk Jang
AU - Eunjin Jung
AU - Jin-Ki Kang
AU - Lee, Won Jae
TI - Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2020
VL - 30
IS - 5
PB - The Korea Association Of Crystal Growth, Inc.
SP - 163
EP - 167
SN - 1225-1429
AB - Ring-shaped SiC (Silicon carbide) polycrystals used as an inner material in semiconductor etching equipment was manufactured using the PVT (Physical Vapor Transport) method. A graphite cylinder structure was placed inside thegraphite crucible to grow a ring-shaped SiC polycrystal by the PVT method. The crystal polytype of grown crystal were analyzed using a Raman and an UVF (Ultra Violet Fluorescence) analysis. And the microstructure and components of SiC crystal were identified by a SEM (Scanning Electron Microscope) and EDS (Energy Disruptive Spectroscopy) analyses. The grain size and growth rate of SiC polycrystals fabricated by this method was varied with temperature variation in the initial stage of growth process.
KW - Silicon carbide;Polycrystal;Ring;PVT;Growth rate
DO - 10.6111/JKCGCT.2020.30.5.163
ER -
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang and Lee, Won Jae. (2020). Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method. Journal of the Korean Crystal Growth and Crystal Technology, 30(5), 163-167.
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang and Lee, Won Jae. 2020, "Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method", Journal of the Korean Crystal Growth and Crystal Technology, vol.30, no.5 pp.163-167. Available from: doi:10.6111/JKCGCT.2020.30.5.163
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang, Lee, Won Jae "Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method" Journal of the Korean Crystal Growth and Crystal Technology 30.5 pp.163-167 (2020) : 163.
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang, Lee, Won Jae. Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method. 2020; 30(5), 163-167. Available from: doi:10.6111/JKCGCT.2020.30.5.163
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang and Lee, Won Jae. "Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method" Journal of the Korean Crystal Growth and Crystal Technology 30, no.5 (2020) : 163-167.doi: 10.6111/JKCGCT.2020.30.5.163
Jin Yong Park; Jeong-Hui Kim; Woo-Yeon Kim; Mi-Seon Park; Yeon-Suk Jang; Eunjin Jung; Jin-Ki Kang; Lee, Won Jae. Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method. Journal of the Korean Crystal Growth and Crystal Technology, 30(5), 163-167. doi: 10.6111/JKCGCT.2020.30.5.163
Jin Yong Park; Jeong-Hui Kim; Woo-Yeon Kim; Mi-Seon Park; Yeon-Suk Jang; Eunjin Jung; Jin-Ki Kang; Lee, Won Jae. Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method. Journal of the Korean Crystal Growth and Crystal Technology. 2020; 30(5) 163-167. doi: 10.6111/JKCGCT.2020.30.5.163
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang, Lee, Won Jae. Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method. 2020; 30(5), 163-167. Available from: doi:10.6111/JKCGCT.2020.30.5.163
Jin Yong Park, Jeong-Hui Kim, Woo-Yeon Kim, Mi-Seon Park, Yeon-Suk Jang, Eunjin Jung, Jin-Ki Kang and Lee, Won Jae. "Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method" Journal of the Korean Crystal Growth and Crystal Technology 30, no.5 (2020) : 163-167.doi: 10.6111/JKCGCT.2020.30.5.163
