@article{ART002639485},
author={Hyo Sang Kang and Kang, Seung-Min},
title={A study on the thermal oxidation process of bulk AlN single crystal grown by PVT},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2020},
volume={30},
number={5},
pages={168-173},
doi={10.6111/JKCGCT.2020.30.5.168}
TY - JOUR
AU - Hyo Sang Kang
AU - Kang, Seung-Min
TI - A study on the thermal oxidation process of bulk AlN single crystal grown by PVT
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2020
VL - 30
IS - 5
PB - The Korea Association Of Crystal Growth, Inc.
SP - 168
EP - 173
SN - 1225-1429
AB - To analyze and describe the behavior and mechanisms occurring in the thermal oxidation process of AlN, bulk AlN single crystals were thermally treated with different temperatures. As a result, it was confirmed that full-scale oxidation of bulk AlN and growth of Al-oxide occurred from the temperature of 800°C, which confirmed that the weight% of O elements tended to increase while the N elements decreased with increasing the temperature. In the case of thermal treatment at 900°C, the grown Al-oxides were merged with neighboring Al-oxides and began to form α-Al2O3 poly-crystals. During thermal treatment at the temperature of 1000°C, hexagonal pyramidal shaped poly-crystalline α-Al2O3 was clearly observed. Through the X-ray diffraction pattern analysis, the changes of surface crystal structure according to the temperature of bulk AlN were investigated in detail.
KW - Aluminum nitride;Bulk AlN;Thermal oxidation;Aluminum oxide;Surface oxidation
DO - 10.6111/JKCGCT.2020.30.5.168
ER -
Hyo Sang Kang and Kang, Seung-Min. (2020). A study on the thermal oxidation process of bulk AlN single crystal grown by PVT. Journal of the Korean Crystal Growth and Crystal Technology, 30(5), 168-173.
Hyo Sang Kang and Kang, Seung-Min. 2020, "A study on the thermal oxidation process of bulk AlN single crystal grown by PVT", Journal of the Korean Crystal Growth and Crystal Technology, vol.30, no.5 pp.168-173. Available from: doi:10.6111/JKCGCT.2020.30.5.168
Hyo Sang Kang, Kang, Seung-Min "A study on the thermal oxidation process of bulk AlN single crystal grown by PVT" Journal of the Korean Crystal Growth and Crystal Technology 30.5 pp.168-173 (2020) : 168.
Hyo Sang Kang, Kang, Seung-Min. A study on the thermal oxidation process of bulk AlN single crystal grown by PVT. 2020; 30(5), 168-173. Available from: doi:10.6111/JKCGCT.2020.30.5.168
Hyo Sang Kang and Kang, Seung-Min. "A study on the thermal oxidation process of bulk AlN single crystal grown by PVT" Journal of the Korean Crystal Growth and Crystal Technology 30, no.5 (2020) : 168-173.doi: 10.6111/JKCGCT.2020.30.5.168
Hyo Sang Kang; Kang, Seung-Min. A study on the thermal oxidation process of bulk AlN single crystal grown by PVT. Journal of the Korean Crystal Growth and Crystal Technology, 30(5), 168-173. doi: 10.6111/JKCGCT.2020.30.5.168
Hyo Sang Kang; Kang, Seung-Min. A study on the thermal oxidation process of bulk AlN single crystal grown by PVT. Journal of the Korean Crystal Growth and Crystal Technology. 2020; 30(5) 168-173. doi: 10.6111/JKCGCT.2020.30.5.168
Hyo Sang Kang, Kang, Seung-Min. A study on the thermal oxidation process of bulk AlN single crystal grown by PVT. 2020; 30(5), 168-173. Available from: doi:10.6111/JKCGCT.2020.30.5.168
Hyo Sang Kang and Kang, Seung-Min. "A study on the thermal oxidation process of bulk AlN single crystal grown by PVT" Journal of the Korean Crystal Growth and Crystal Technology 30, no.5 (2020) : 168-173.doi: 10.6111/JKCGCT.2020.30.5.168
