Gas phase synthesis of Ga2O3 nanoparticles from gallium metal (기상합성법을 이용한 산화갈륨 나노분말의 제조)

Jung Won Park (박정원); Chang Min Won (원창민); Jun Beom Kwon (권준범); Hyukjae Lee (이혁재)

doi:10.6111/JKCGCT.2020.30.6.220

Gas phase synthesis of Ga2O3 nanoparticles from gallium metal

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(6), pp.220-225
DOI : 10.6111/JKCGCT.2020.30.6.220
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : October 12, 2020
Accepted : October 30, 2020
Published : December 31, 2020

Jung Won Park ¹, Chang Min Won ², Jun Beom Kwon ¹, Hyukjae Lee ³

¹퀀타머티리얼즈
²안동대학교 재료공학과
³안동대학교

Accredited

ABSTRACT

Gallium oxide nano-powder, the key starting material for IGZO target, is fabricated by gas phase synthesis using a new apparatus consist of reaction, transportation, and collection parts. As a result of gallium metal evaporation above 1150°C, Ga2O3 nano-powders, are successfully synthesized. The SEM images of the synthesized powders displace the spherical shaped powders without severe agglomeration. X-ray diffraction and PSA analysis show that the higher temperature at the reaction part results in the better crystallinity and larger powder size of the synthesized Ga2O3. To see the applicability to IGZO target, Ga2O3 nano-powders synthesized at 1250°C are mixed with indium oxide and zinc oxide (In2O3 : Ga2O3 : ZnO=1 : 1 : 1), and then sintered at 1400~1500°C. The highest sintered density of 5.83 g/㎤(= 91 % of relative density) is achieved when sintered at 1450°C, showing better sinterability compared to the commercially available Ga2O3 powder, which has 5.61 g/㎤ of sintered density at the same condition.

KEYWORDS

Gas-phase synthesis, Nanoparticles, Gallium oxide, Gallium metal

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Gas phase synthesis of Ga2O3 nanoparticles from gallium metal

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* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Gas phase synthesis of Ga2O3 nanoparticles from gallium metal

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