@article{ART003278352},
author={Yong-Jun Seo and Yoonsoo Han},
title={Effect of crystallinity on via hole characteristics in photosensitive glass for TGV},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2025},
volume={35},
number={4},
pages={139-146},
doi={10.6111/JKCGCT.2025.35.4.139}
TY - JOUR
AU - Yong-Jun Seo
AU - Yoonsoo Han
TI - Effect of crystallinity on via hole characteristics in photosensitive glass for TGV
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2025
VL - 35
IS - 4
PB - The Korea Association Of Crystal Growth, Inc.
SP - 139
EP - 146
SN - 1225-1429
AB - The advancement of Artificial Intelligence (AI), mobile, and Internet of Things (IoT) technologies has driven the demand for high integration, high-speed signal transmission, and fine patterning in semiconductor packaging. While organic substrates are commonly used, they present limitations in planarity, thermal/mechanical stability, and dielectric properties. Glass substrates offer superior characteristics, but their brittleness hinders fine-pattern processing, particularly in forming Through Glass Via (TGV). This study presents a TGV fabrication method using photosensitive glass based on Ce- and Ag- doped lithium aluminosilicate (LAS). Selective crystallization of lithium metasilicate (LMS) was achieved via UV exposure and thermal treatment, followed by hydrofluoric acid etching to form vias. Key process parameters were analyzed for their impact on via formation and quality, and the proposed process enhanced controllability over via morphology while offering practical insights into advanced packaging applications using photosensitive glass.
KW - Glass substrate;TGV;Photosensitive glass;Advanced packaging
DO - 10.6111/JKCGCT.2025.35.4.139
ER -
Yong-Jun Seo and Yoonsoo Han. (2025). Effect of crystallinity on via hole characteristics in photosensitive glass for TGV. Journal of the Korean Crystal Growth and Crystal Technology, 35(4), 139-146.
Yong-Jun Seo and Yoonsoo Han. 2025, "Effect of crystallinity on via hole characteristics in photosensitive glass for TGV", Journal of the Korean Crystal Growth and Crystal Technology, vol.35, no.4 pp.139-146. Available from: doi:10.6111/JKCGCT.2025.35.4.139
Yong-Jun Seo, Yoonsoo Han "Effect of crystallinity on via hole characteristics in photosensitive glass for TGV" Journal of the Korean Crystal Growth and Crystal Technology 35.4 pp.139-146 (2025) : 139.
Yong-Jun Seo, Yoonsoo Han. Effect of crystallinity on via hole characteristics in photosensitive glass for TGV. 2025; 35(4), 139-146. Available from: doi:10.6111/JKCGCT.2025.35.4.139
Yong-Jun Seo and Yoonsoo Han. "Effect of crystallinity on via hole characteristics in photosensitive glass for TGV" Journal of the Korean Crystal Growth and Crystal Technology 35, no.4 (2025) : 139-146.doi: 10.6111/JKCGCT.2025.35.4.139
Yong-Jun Seo; Yoonsoo Han. Effect of crystallinity on via hole characteristics in photosensitive glass for TGV. Journal of the Korean Crystal Growth and Crystal Technology, 35(4), 139-146. doi: 10.6111/JKCGCT.2025.35.4.139
Yong-Jun Seo; Yoonsoo Han. Effect of crystallinity on via hole characteristics in photosensitive glass for TGV. Journal of the Korean Crystal Growth and Crystal Technology. 2025; 35(4) 139-146. doi: 10.6111/JKCGCT.2025.35.4.139
Yong-Jun Seo, Yoonsoo Han. Effect of crystallinity on via hole characteristics in photosensitive glass for TGV. 2025; 35(4), 139-146. Available from: doi:10.6111/JKCGCT.2025.35.4.139
Yong-Jun Seo and Yoonsoo Han. "Effect of crystallinity on via hole characteristics in photosensitive glass for TGV" Journal of the Korean Crystal Growth and Crystal Technology 35, no.4 (2025) : 139-146.doi: 10.6111/JKCGCT.2025.35.4.139
