KJCKorea
Journal Central

@article{ART002522314},
author={So, Young Ho and Song， Jung Ho and Seo， Dong Myung and Oh teresa},
title={A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature},
journal={Industry Promotion Research},
issn={2466-1139},
year={2016},
volume={1},
number={1},
pages={1-6}

TY - JOUR
AU - So, Young Ho
AU - Song， Jung Ho
AU - Seo， Dong Myung
AU - Oh teresa
TI - A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature
JO - Industry Promotion Research
PY - 2016
VL - 1
IS - 1
PB - Industrial Promotion Institute
SP - 1
EP - 6
SN - 2466-1139
AB - To research the correlation between the amorphous and crystal structure of oxide semiconductors, AZO and IGZO films were deposited and annealed with various temperatures in a vacuum state. AZO increased the degree of crystal structure with increasing the annealing temperature, but IGZO became an amorphous structure after the annealing process at high temperature. The series of AZO films with various annealing temperatures showed the chemical shift from the analyzer of PL and O 1s spectra, but the results of IGZO films by PL and O 1s spectra were not observed the chemical shift. The binding energy of oxygen vacancy of AZO with a crystal structure was 531.5 eV, and that of IGZO with an amorphous structure was 530 eV as a lower binding energy.
KW - IGZO;AZO;XPS;XRD;ZnO
DO -
UR -
ER -

So, Young Ho, Song， Jung Ho, Seo， Dong Myung and Oh teresa. (2016). A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature. Industry Promotion Research, 1(1), 1-6.

So, Young Ho, Song， Jung Ho, Seo， Dong Myung and Oh teresa. 2016, "A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature", Industry Promotion Research, vol.1, no.1 pp.1-6.

So, Young Ho, Song， Jung Ho, Seo， Dong Myung, Oh teresa "A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature" Industry Promotion Research 1.1 pp.1-6 (2016) : 1.

So, Young Ho, Song， Jung Ho, Seo， Dong Myung, Oh teresa. A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature. 2016; 1(1), 1-6.

So, Young Ho, Song， Jung Ho, Seo， Dong Myung and Oh teresa. "A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature" Industry Promotion Research 1, no.1 (2016) : 1-6.

So, Young Ho; Song， Jung Ho; Seo， Dong Myung; Oh teresa. A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature. Industry Promotion Research, 1(1), 1-6.

So, Young Ho; Song， Jung Ho; Seo， Dong Myung; Oh teresa. A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature. Industry Promotion Research. 2016; 1(1) 1-6.

So, Young Ho, Song， Jung Ho, Seo， Dong Myung, Oh teresa. A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature. 2016; 1(1), 1-6.

So, Young Ho, Song， Jung Ho, Seo， Dong Myung and Oh teresa. "A Study on the Chemical Properties of AZO with Crystal Structure and IGZO of Amorphous Structure Due to the Annealing Temperature" Industry Promotion Research 1, no.1 (2016) : 1-6.