@article{ART002522316},
author={Ann, Young Deuk and Yeon， Jae Ho and Oh teresa},
title={Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films},
journal={Industry Promotion Research},
issn={2466-1139},
year={2016},
volume={1},
number={1},
pages={7-11}
TY - JOUR
AU - Ann, Young Deuk
AU - Yeon， Jae Ho
AU - Oh teresa
TI - Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films
JO - Industry Promotion Research
PY - 2016
VL - 1
IS - 1
PB - Industrial Promotion Institute
SP - 7
EP - 11
SN - 2466-1139
AB - It was the electrical properties of IGZO prepared by the annealing in a vaccum and an atmosphere conditions to research the current-voltage characteristics. The IGZO film annealed in a vaccum became an amorphous structure but films annealed in an atmosphere condition had a crystal structure. Because of the content of oxygen vacancies during the annealing processes was changed, and the annealing in an atmosphere condition increased the oxygen vacancy in IGZO. Oxygen vacancy in IGZO increased the current and then it was observed the Ohmic contact at IGZO annealed in an atmosphere conditions. However, the IGZO prepared in a vaccum showed the Schottky contact.
KW - IGZO;PL;XPS;Binding Energy;Schottky Contact
DO -
UR -
ER -
Ann, Young Deuk, Yeon， Jae Ho and Oh teresa. (2016). Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films. Industry Promotion Research, 1(1), 7-11.
Ann, Young Deuk, Yeon， Jae Ho and Oh teresa. 2016, "Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films", Industry Promotion Research, vol.1, no.1 pp.7-11.
Ann, Young Deuk, Yeon， Jae Ho, Oh teresa "Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films" Industry Promotion Research 1.1 pp.7-11 (2016) : 7.
Ann, Young Deuk, Yeon， Jae Ho, Oh teresa. Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films. 2016; 1(1), 7-11.
Ann, Young Deuk, Yeon， Jae Ho and Oh teresa. "Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films" Industry Promotion Research 1, no.1 (2016) : 7-11.
Ann, Young Deuk; Yeon， Jae Ho; Oh teresa. Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films. Industry Promotion Research, 1(1), 7-11.
Ann, Young Deuk; Yeon， Jae Ho; Oh teresa. Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films. Industry Promotion Research. 2016; 1(1) 7-11.
Ann, Young Deuk, Yeon， Jae Ho, Oh teresa. Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films. 2016; 1(1), 7-11.
Ann, Young Deuk, Yeon， Jae Ho and Oh teresa. "Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films" Industry Promotion Research 1, no.1 (2016) : 7-11.
