2012, Vol.22, No.6

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

pISSN : 1225-1429 / eISSN : 2234-5078
https://journal.kci.go.kr/jkcgct

In this paper, we investigated characteristics of etching induced surface morphology variation by wet etching of GaN epilayer were grown on sapphire (0001) substrate by hydride vapor phase epitaxy (HVPE). As a results of scanning electron microscope (SEM) observation, three types of hexagonal etch pits (Edge, Screw, Mixed) were formed by the GaN epilayer thickness variations. A lot of etch pits, attributed to screw and mixed type TD, were observed at thinner epilayer,leading to high etch pit density. On the other hand, the thickness of GaN epilayer increased with the number of etch pits corresponding to edge and mixed dislocations, which are the majority of TDs are observed.

The growth of AlN single crystals of large size and good quality is of prime importance for UV LEDs and power devices applications. However, the crystals having the size of more than 1 inch and high quality have not been reported in the world. In the PVT growth of AlN, the crystal morphology of as grown were important because the preferred orientation of growth of it was evaluated for growth rate increase. In the present study, the AlN single crystals grown by PVT process were evaluated by the side of the growth morphology. Optical microscopic characterization was carried out to observe the shape of the crystals and the growth facets. Furthermore the growth habit of it were discussed by observation of the surface of AlN crystals.

Ammonia decomposition over titanium carbides were investigated using eight different samples which have been synthesized by TPR (temperature-programmed reduction) method of titanium oxide (TiO2) with pure CH4. The resulting materials which were synthesized using wo different heating rates and space velocity exhibited the different surface areas. These results indicated that the structural properties of these materials have been related to heating rates and space velocity employed. The titanium carbides prepared in this study proved to be active for ammonia decomposition, and the activity changed with the particle size/surface area. These showed the relationship between ammonia decomposition activity and the different active species. Compared to molybdenum carbide, the titanium carbides were one order of magnitude less active,suggesting the correlation between the activity difference and the degree of electron transfer between metals and carbon in metal carbides.