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Direct synthesis mechanism of amorphous SiOx nanowires from Ni/Si substrate

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2006, 16(6), pp.256-259
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

송원영 1 Hyoungsub Kim 1 YOON, DAEHO 1 신동익 1 Hojune Lee 1 KIM, SANG-WOO 2

1성균관대학교
2공주대학교

Accredited

ABSTRACT

The amorphous SiOx nanowires were synthesized by the vapor phase epitaxy (VPE) method. SiOx nanowires were formed on silicon wafer of temperatures ranged from 800~1100oC and nickel thin film was used as a catalyst for the growth of nanowires. A vapor-liquid-solid (VLS) mechanism is responsible for the catalyst-assisted amorphous SiOx nanowires synthesis in this experiment. The SEM images showed cotton-like nanostructure of free standing SiOx nanowires with the length of more than about 10 mm. The SiOx nanowires were confirmed amorphous structure by TEM analysis and EDX spectrum reveals that the nanowires consist of Si and O.

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