@article{ART001939570},
author={Cheol Woo Park and 홍윤표 and Jae Hwa Park and 오동근 and Bonggeun Choi and 이성국 and Kwang Bo Shim},
title={Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2014},
volume={24},
number={6},
pages={237-241},
doi={10.6111/JKCGCT.2014.24.6.237}
TY - JOUR
AU - Cheol Woo Park
AU - 홍윤표
AU - Jae Hwa Park
AU - 오동근
AU - Bonggeun Choi
AU - 이성국
AU - Kwang Bo Shim
TI - Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2014
VL - 24
IS - 6
PB - The Korea Association Of Crystal Growth, Inc.
SP - 237
EP - 241
SN - 1225-1429
AB - We investigated the optimal etching conditions and properties of the surface change due to molten KOH/NaOHchemical wet etching using an AlN wafer which has been put to practical use in the present study. Results were observedusing a scanning electron microscope after 5 minutes etching at 350oC, was found to have a surface form of the respectiveother Al-face, the N-face. In particular, etch-pit in the form of a hexagon, which is observed in the Al-face appeared, Itwas calculated at 2 × 106/cm2~1010/cm2dislocation density. In the case of N-face, lattice defects in the form of the hexagonalpyramids is formed. It was discovered that in order to observe the orientation of the wafer, which corresponds to the Caxisdirection of the resulting hexagonal AlN which was analyzed using XRD (0002) and is a state of being oriented inthe (0004) plane. The Radius of curvature of AlN wafer was 1.6~17 m measured by DC-XRD rocking curve position.
KW - AlN;Radius curvature;KOH/NaOH;Etching;Wet etching;Etch pit
DO - 10.6111/JKCGCT.2014.24.6.237
ER -
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국 and Kwang Bo Shim. (2014). Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal. Journal of the Korean Crystal Growth and Crystal Technology, 24(6), 237-241.
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국 and Kwang Bo Shim. 2014, "Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal", Journal of the Korean Crystal Growth and Crystal Technology, vol.24, no.6 pp.237-241. Available from: doi:10.6111/JKCGCT.2014.24.6.237
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국, Kwang Bo Shim "Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal" Journal of the Korean Crystal Growth and Crystal Technology 24.6 pp.237-241 (2014) : 237.
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국, Kwang Bo Shim. Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal. 2014; 24(6), 237-241. Available from: doi:10.6111/JKCGCT.2014.24.6.237
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국 and Kwang Bo Shim. "Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal" Journal of the Korean Crystal Growth and Crystal Technology 24, no.6 (2014) : 237-241.doi: 10.6111/JKCGCT.2014.24.6.237
Cheol Woo Park; 홍윤표; Jae Hwa Park; 오동근; Bonggeun Choi; 이성국; Kwang Bo Shim. Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal. Journal of the Korean Crystal Growth and Crystal Technology, 24(6), 237-241. doi: 10.6111/JKCGCT.2014.24.6.237
Cheol Woo Park; 홍윤표; Jae Hwa Park; 오동근; Bonggeun Choi; 이성국; Kwang Bo Shim. Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal. Journal of the Korean Crystal Growth and Crystal Technology. 2014; 24(6) 237-241. doi: 10.6111/JKCGCT.2014.24.6.237
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국, Kwang Bo Shim. Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal. 2014; 24(6), 237-241. Available from: doi:10.6111/JKCGCT.2014.24.6.237
Cheol Woo Park, 홍윤표, Jae Hwa Park, 오동근, Bonggeun Choi, 이성국 and Kwang Bo Shim. "Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal" Journal of the Korean Crystal Growth and Crystal Technology 24, no.6 (2014) : 237-241.doi: 10.6111/JKCGCT.2014.24.6.237
