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@article{ART002890553},
author={Im Gyu Yeo and Jae Yoon Lee and Myong Chuel Chun},
title={4H-SiC bulk single crystal growth using recycled powder},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2022},
volume={32},
number={5},
pages={169-174},
doi={10.6111/JKCGCT.2022.32.5.169}

TY - JOUR
AU - Im Gyu Yeo
AU - Jae Yoon Lee
AU - Myong Chuel Chun
TI - 4H-SiC bulk single crystal growth using recycled powder
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2022
VL - 32
IS - 5
PB - The Korea Association Of Crystal Growth, Inc.
SP - 169
EP - 174
SN - 1225-1429
AB - This study is to verify the feasibility of SiC single crystal growth using recycled SiC powder. The fundamental physical properties such as particle size, shape, composition and impurities of the recycled powder were analyzed, and the sublimation behavior occurring inside the reactor were predicted using the basic data. As a result of comprehensive judgment,the physical properties of the recycled powder were suitable for single crystal growth, and single crystal growth experiments were conducted using this. 100 mm 4H-SiC single crystal ingot with a height of 25 mm was grown without poly type inclusion. In the case of micro-pipe density was 0.02 ea/cm² and resistivity characteristics was 0.015~0.020 ohm·cm², commercial level quality was obtained, but additional analysis related to dislocation density and stacking faults is required for device application.
KW - Silicon carbide;Single crystal;Sublimation;Recycled powder;Substrate
DO - 10.6111/JKCGCT.2022.32.5.169
ER -

Im Gyu Yeo, Jae Yoon Lee and Myong Chuel Chun. (2022). 4H-SiC bulk single crystal growth using recycled powder. Journal of the Korean Crystal Growth and Crystal Technology, 32(5), 169-174.

Im Gyu Yeo, Jae Yoon Lee and Myong Chuel Chun. 2022, "4H-SiC bulk single crystal growth using recycled powder", Journal of the Korean Crystal Growth and Crystal Technology, vol.32, no.5 pp.169-174. Available from: doi:10.6111/JKCGCT.2022.32.5.169

Im Gyu Yeo, Jae Yoon Lee, Myong Chuel Chun "4H-SiC bulk single crystal growth using recycled powder" Journal of the Korean Crystal Growth and Crystal Technology 32.5 pp.169-174 (2022) : 169.

Im Gyu Yeo, Jae Yoon Lee, Myong Chuel Chun. 4H-SiC bulk single crystal growth using recycled powder. 2022; 32(5), 169-174. Available from: doi:10.6111/JKCGCT.2022.32.5.169

Im Gyu Yeo, Jae Yoon Lee and Myong Chuel Chun. "4H-SiC bulk single crystal growth using recycled powder" Journal of the Korean Crystal Growth and Crystal Technology 32, no.5 (2022) : 169-174.doi: 10.6111/JKCGCT.2022.32.5.169

Im Gyu Yeo; Jae Yoon Lee; Myong Chuel Chun. 4H-SiC bulk single crystal growth using recycled powder. Journal of the Korean Crystal Growth and Crystal Technology, 32(5), 169-174. doi: 10.6111/JKCGCT.2022.32.5.169

Im Gyu Yeo; Jae Yoon Lee; Myong Chuel Chun. 4H-SiC bulk single crystal growth using recycled powder. Journal of the Korean Crystal Growth and Crystal Technology. 2022; 32(5) 169-174. doi: 10.6111/JKCGCT.2022.32.5.169

Im Gyu Yeo, Jae Yoon Lee, Myong Chuel Chun. 4H-SiC bulk single crystal growth using recycled powder. 2022; 32(5), 169-174. Available from: doi:10.6111/JKCGCT.2022.32.5.169

Im Gyu Yeo, Jae Yoon Lee and Myong Chuel Chun. "4H-SiC bulk single crystal growth using recycled powder" Journal of the Korean Crystal Growth and Crystal Technology 32, no.5 (2022) : 169-174.doi: 10.6111/JKCGCT.2022.32.5.169