@article{ART003053526},
author={Ye-Jin Choi and Min-Gyu Kang and Gi-Uk Lee and Mi-Seon Park and Gwang-Hee Jung and Hea-Kyun Jung and Doo-Gun Kim and Lee, Won Jae},
title={Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2024},
volume={34},
number={1},
pages={8-15},
doi={10.6111/JKCGCT.2024.34.1.008}
TY - JOUR
AU - Ye-Jin Choi
AU - Min-Gyu Kang
AU - Gi-Uk Lee
AU - Mi-Seon Park
AU - Gwang-Hee Jung
AU - Hea-Kyun Jung
AU - Doo-Gun Kim
AU - Lee, Won Jae
TI - Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2024
VL - 34
IS - 1
PB - The Korea Association Of Crystal Growth, Inc.
SP - 8
EP - 15
SN - 1225-1429
AB - The CaF2 single crystal has notable characteristics such as a large band gap (12 eV), excellent transparency over a wide wavelength range, low refractive index and dispersion. Due to these outstanding properties, CaF2 single crystal has considered as a promising material for short-wavelength light sources in recent lithography processes. However, there is an inherent birefringence of the material at 157 nm and the resulting aberration can be compensated for through the combination of the (100) plane and the (111) plane. Therefore, it is necessary to investigate the characteristics according to the plane. In thisstudy, we analyzed crystallinity, optical properties of commercial CaF2 single crystal wafers grown by the Czochralski method. In particular, through chemical etching under various conditions, it was confirmed that the shape of etch pits appears differently depending on the plane and the shape and array of specific etch pits affected by dislocations and defects were examined.
KW - CaF2;Czochralski method;Crystallinity;Optical properties;Chemical Etching;Etch pit
DO - 10.6111/JKCGCT.2024.34.1.008
ER -
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim and Lee, Won Jae. (2024). Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation. Journal of the Korean Crystal Growth and Crystal Technology, 34(1), 8-15.
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim and Lee, Won Jae. 2024, "Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation", Journal of the Korean Crystal Growth and Crystal Technology, vol.34, no.1 pp.8-15. Available from: doi:10.6111/JKCGCT.2024.34.1.008
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim, Lee, Won Jae "Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation" Journal of the Korean Crystal Growth and Crystal Technology 34.1 pp.8-15 (2024) : 8.
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim, Lee, Won Jae. Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation. 2024; 34(1), 8-15. Available from: doi:10.6111/JKCGCT.2024.34.1.008
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim and Lee, Won Jae. "Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation" Journal of the Korean Crystal Growth and Crystal Technology 34, no.1 (2024) : 8-15.doi: 10.6111/JKCGCT.2024.34.1.008
Ye-Jin Choi; Min-Gyu Kang; Gi-Uk Lee; Mi-Seon Park; Gwang-Hee Jung; Hea-Kyun Jung; Doo-Gun Kim; Lee, Won Jae. Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation. Journal of the Korean Crystal Growth and Crystal Technology, 34(1), 8-15. doi: 10.6111/JKCGCT.2024.34.1.008
Ye-Jin Choi; Min-Gyu Kang; Gi-Uk Lee; Mi-Seon Park; Gwang-Hee Jung; Hea-Kyun Jung; Doo-Gun Kim; Lee, Won Jae. Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation. Journal of the Korean Crystal Growth and Crystal Technology. 2024; 34(1) 8-15. doi: 10.6111/JKCGCT.2024.34.1.008
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim, Lee, Won Jae. Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation. 2024; 34(1), 8-15. Available from: doi:10.6111/JKCGCT.2024.34.1.008
Ye-Jin Choi, Min-Gyu Kang, Gi-Uk Lee, Mi-Seon Park, Gwang-Hee Jung, Hea-Kyun Jung, Doo-Gun Kim and Lee, Won Jae. "Defect analysis of calcium fluoride single crystal substrates with (100) and (111) orientation" Journal of the Korean Crystal Growth and Crystal Technology 34, no.1 (2024) : 8-15.doi: 10.6111/JKCGCT.2024.34.1.008
