2024, Vol.34, No.1

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

pISSN : 1225-1429 / eISSN : 2234-5078
https://journal.kci.go.kr/jkcgct

β-Ga₂O₃ is a material with a wide band gap of ~4.8eV and a high breakdown-voltage of 8MV/cm, and is attracting much attention in the field of power device applications. In addition, compared to representative WBG semiconductor materials such as SiC, GaN and Diamond, it has the advantage of enabling single crystal growth with high growth rate and low manufacturing cost [1-4]. In this study, we succeeded in growing a 10 mm thick β-Ga₂O₃ singlecrystal doped with 0.3 mol% SnO2 through the EFG (Edge-defined Film-fed Growth) method using multi-slit structure. The growth direction and growth plane were set to [010]/(010), respectively, and the growth speed was about 12 mm/h. The grown β-Ga₂O₃ single crystal was cut into various crystal planes (010, 001, 100, 201) and surface processed. The processed samples were compared for characteristics according to crystal plane through analysis such as XRD, UV/VIS/NIR/Spec., Mercury Probe, AFM and Etching. This research is expected to contribute to the development of power semiconductor technology in high-voltage and high-temperature applications, and selecting a substrate with better characteristics will playan important role in improving device performance and reliability.

The CaF2 single crystal has notable characteristics such as a large band gap (12 eV), excellent transparency over a wide wavelength range, low refractive index and dispersion. Due to these outstanding properties, CaF2 single crystal has considered as a promising material for short-wavelength light sources in recent lithography processes. However, there is an inherent birefringence of the material at 157 nm and the resulting aberration can be compensated for through the combination of the (100) plane and the (111) plane. Therefore, it is necessary to investigate the characteristics according to the plane. In thisstudy, we analyzed crystallinity, optical properties of commercial CaF2 single crystal wafers grown by the Czochralski method. In particular, through chemical etching under various conditions, it was confirmed that the shape of etch pits appears differently depending on the plane and the shape and array of specific etch pits affected by dislocations and defects were examined.

Using electrochromic devices (ECD), smart window films that can change the colors from tinted state into transparent state by applying an external voltage were manufactured. Polyethylene terephthalate (PET) film was used as a substrate instead of conventional glass, and ECD modules having a total thickness of about 50 μm were manufactured by sequentially introducing an ITO/Ag/ITO electrode layer, a WO3/TIC2 organic discoloration layer, and a Nafion fluorine electrolyte layer. Through a series of sputtering, bar coating, and thermal compression processes, a large scale smart window with a horizontal and vertical length of more than 80 mm was manufactured. When DC 3.5 V was applied, the transmittance decreased from 54 % to 24 % and moreover the color change could be confirmed even with the naked eye. Reversible color change capability at low external voltage implies that external sunlight can be selectively blocked which is effective in terms of energy saving.