2011, Vol.21, No.6

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

pISSN : 1225-1429 / eISSN : 2234-5078
https://journal.kci.go.kr/jkcgct

Most of the silicon cutting methods using the multi-wire with the slurry injection have been used for wafers of the crystalline solar cell. But the productivity of slurry injection cutting type falls due to low cutting speeds. Also, the direct contact with the metal wire and silicon block increases the concentration of metallic impurities in the wafer’s surface. In addition, the abrasive silicon carbide (SiC) generates pollutants. And production costs are rising because it does not re-use the worn wire. On the other hand, the productivity of the cutting method using the diamond coated wire is about 2 times faster than the slurry injection cutting type. Also, the continuous cutting using the used wire of low wear is possible. And this is a big advantage for reduced production costs. Therefore, the cutting method of the diamond coated wire is more efficient than the slurry injection cutting technique. In this study, each cutting type is analyzed using the surface characteristics of the solar wafer and will describe the effects of the manufacturing process of the solar cell. Finally, we will suggest improvement methods of the solar cell process for using the diamond cutting type wafer.

High density plasma etching of ZnO film was performed in CF4/Ar and SF6/Ar inductively coupled plasmas. Maximum etch rates of ~1950 Å/min and ~1400 Å/min were obtained for 10CF4/5Ar and 10SF6/5Ar ICP discharges,respectively. The etched ZnO surfaces showed better RMS roughness values than the unetched control sample under most of the conditions examined. In the 10CF4/5Ar ICP discharges, very high etch selectivities were obtained for ZnO over Ni (max. 11) while Al showed etch selectivities in the range of 1.6~4.7 to ZnO.

TiCrN layers (Ti : Cr = 20 : 80 and 5 : 95 wt%) were deposited on Inconel 617 and the effect of TiCrN coating on the high temperature stability of Inconel 617 up to 1000oC was examined. XRD analysis and microstructural observation showed that vigorous and inhomogenous Cr diffusion to the surface was suppressed by TiCrN layer compare to the uncoated Inconel 617. This led to a distinctive enhancement in thermal oxidation resistance of Inconel 617.