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@article{ART001402535},
author={Jinho Kim and 이민 and Jonghee Hwang and Tae-Young Lim and Sae Hoon Kim},
title={Fabrication of patterned substrate by wet process for biochip},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2009},
volume={19},
number={6},
pages={288-292}

TY - JOUR
AU - Jinho Kim
AU - 이민
AU - Jonghee Hwang
AU - Tae-Young Lim
AU - Sae Hoon Kim
TI - Fabrication of patterned substrate by wet process for biochip
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2009
VL - 19
IS - 6
PB - The Korea Association Of Crystal Growth, Inc.
SP - 288
EP - 292
SN - 1225-1429
AB - Hydrophobic/hydrophilic patterned substrates were fabricated on a glass substrate by a liquid phase deposition (LPD) method. Hydrophobic surface was obtained by modifying ZnO thin films with a rough surface using a fluoroalkyltrimethoxysilane (FAS) and hydrophilic surface was prepared by decomposing FAS on an exposed to UV light. The hexagonal ZnO rods were perpendicularly grown by LPD method on glass substrates with a ZnO seed layer. The diameter and thickness of hexagonal ZnO rods were increased as a function of increases of immersion time. The surface morphology, thickness, crystal structure, transmittance and contact angle of prepared ZnO thin films were measured by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), UV-visible spectrophotometer (UV-vis) and contact angle measurement. Hydrophilic ZnO thin films with a contact angle of 20 o ~30 o were changed to a hydrophobic surface with a contact angle of 145 o ~161 o by a FAS surface treatment. Prepared hydrophobic surface was pattered by an irradiation of UV light using shadow mask with 300 μm or 3 mm dot size. Finally, the hydrophobic surface exposed to UV light was changed to a hydrophilic surface.
KW - ZnO thin film;Hydrophobic/hydrophilic surface;LPD;Biochip
DO -
UR -
ER -

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim and Sae Hoon Kim. (2009). Fabrication of patterned substrate by wet process for biochip. Journal of the Korean Crystal Growth and Crystal Technology, 19(6), 288-292.

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim and Sae Hoon Kim. 2009, "Fabrication of patterned substrate by wet process for biochip", Journal of the Korean Crystal Growth and Crystal Technology, vol.19, no.6 pp.288-292.

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim, Sae Hoon Kim "Fabrication of patterned substrate by wet process for biochip" Journal of the Korean Crystal Growth and Crystal Technology 19.6 pp.288-292 (2009) : 288.

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim, Sae Hoon Kim. Fabrication of patterned substrate by wet process for biochip. 2009; 19(6), 288-292.

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim and Sae Hoon Kim. "Fabrication of patterned substrate by wet process for biochip" Journal of the Korean Crystal Growth and Crystal Technology 19, no.6 (2009) : 288-292.

Jinho Kim; 이민; Jonghee Hwang; Tae-Young Lim; Sae Hoon Kim. Fabrication of patterned substrate by wet process for biochip. Journal of the Korean Crystal Growth and Crystal Technology, 19(6), 288-292.

Jinho Kim; 이민; Jonghee Hwang; Tae-Young Lim; Sae Hoon Kim. Fabrication of patterned substrate by wet process for biochip. Journal of the Korean Crystal Growth and Crystal Technology. 2009; 19(6) 288-292.

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim, Sae Hoon Kim. Fabrication of patterned substrate by wet process for biochip. 2009; 19(6), 288-292.

Jinho Kim, 이민, Jonghee Hwang, Tae-Young Lim and Sae Hoon Kim. "Fabrication of patterned substrate by wet process for biochip" Journal of the Korean Crystal Growth and Crystal Technology 19, no.6 (2009) : 288-292.