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Design of Software Architecture for Integrating of Messages between Semiconductor Equipments

  • Journal of The Korea Society of Computer and Information
  • Abbr : JKSCI
  • 2007, 12(2), pp.151-160
  • Publisher : The Korean Society Of Computer And Information
  • Research Area : Engineering > Computer Science

임용묵 1 황인수 1 KIM WOO SUNG 1 박근덕 1

1호서대학교

Accredited

ABSTRACT

It is very important to collect all production-related status values during the manufacturing process of semiconductor. The analysis results of the collected data can be used for the operation rate, fault diagnosis, process control and removal of predicted obstacles of equipments, eventually contributing to the improvement of production efficiency. For this purpose, many IC makers have adopted EES(Equipment Engineering System). As the use of web has become a daily life activity lately, it has been suggested to expand the scope of monitoring equipments using HTTP or SOAP protocols. To fulfill the web-based EES, EDA(Equipment Data Aquisition) should be facilitated first by integrating and standardizing various forms of messages generated from many different semiconductor equipments. In this paper, a method for integration between different types of information is suggested based on the analysis of various protocols used for the communication between semiconductor equipments. In addition, a software architecture to support the method is designed.

Citation status

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