@article{ART001069691},
author={임용묵 and 황인수 and KIM WOO SUNG and 박근덕},
title={Design of Software Architecture for Integrating of Messages between Semiconductor Equipments},
journal={Journal of The Korea Society of Computer and Information},
issn={1598-849X},
year={2007},
volume={12},
number={2},
pages={151-160}
TY - JOUR
AU - 임용묵
AU - 황인수
AU - KIM WOO SUNG
AU - 박근덕
TI - Design of Software Architecture for Integrating of Messages between Semiconductor Equipments
JO - Journal of The Korea Society of Computer and Information
PY - 2007
VL - 12
IS - 2
PB - The Korean Society Of Computer And Information
SP - 151
EP - 160
SN - 1598-849X
AB - It is very important to collect all production-related status values during the manufacturing process of semiconductor. The analysis results of the collected data can be used for the operation rate, fault diagnosis, process control and removal of predicted obstacles of equipments, eventually contributing to the improvement of production efficiency. For this purpose, many IC makers have adopted EES(Equipment Engineering System). As the use of web has become a daily life activity lately, it has been suggested to expand the scope of monitoring equipments using HTTP or SOAP protocols. To fulfill the web-based EES, EDA(Equipment Data Aquisition) should be facilitated first by integrating and standardizing various forms of messages generated from many different semiconductor equipments. In this paper, a method for integration between different types of information is suggested based on the analysis of various protocols used for the communication between semiconductor equipments. In addition, a software architecture to support the method is designed.
KW - 반도체 장비(Semiconductor Equipment);인터페이스 킷(Interface Kit);통합 메시지(Integrated Message);XML
DO -
UR -
ER -
임용묵, 황인수, KIM WOO SUNG and 박근덕. (2007). Design of Software Architecture for Integrating of Messages between Semiconductor Equipments. Journal of The Korea Society of Computer and Information, 12(2), 151-160.
임용묵, 황인수, KIM WOO SUNG and 박근덕. 2007, "Design of Software Architecture for Integrating of Messages between Semiconductor Equipments", Journal of The Korea Society of Computer and Information, vol.12, no.2 pp.151-160.
임용묵, 황인수, KIM WOO SUNG, 박근덕 "Design of Software Architecture for Integrating of Messages between Semiconductor Equipments" Journal of The Korea Society of Computer and Information 12.2 pp.151-160 (2007) : 151.
임용묵, 황인수, KIM WOO SUNG, 박근덕. Design of Software Architecture for Integrating of Messages between Semiconductor Equipments. 2007; 12(2), 151-160.
임용묵, 황인수, KIM WOO SUNG and 박근덕. "Design of Software Architecture for Integrating of Messages between Semiconductor Equipments" Journal of The Korea Society of Computer and Information 12, no.2 (2007) : 151-160.
임용묵; 황인수; KIM WOO SUNG; 박근덕. Design of Software Architecture for Integrating of Messages between Semiconductor Equipments. Journal of The Korea Society of Computer and Information, 12(2), 151-160.
임용묵; 황인수; KIM WOO SUNG; 박근덕. Design of Software Architecture for Integrating of Messages between Semiconductor Equipments. Journal of The Korea Society of Computer and Information. 2007; 12(2) 151-160.
임용묵, 황인수, KIM WOO SUNG, 박근덕. Design of Software Architecture for Integrating of Messages between Semiconductor Equipments. 2007; 12(2), 151-160.
임용묵, 황인수, KIM WOO SUNG and 박근덕. "Design of Software Architecture for Integrating of Messages between Semiconductor Equipments" Journal of The Korea Society of Computer and Information 12, no.2 (2007) : 151-160.
